[epi2] Epi2: Second Chamber Update
Ted Berg
tberg at stanford.edu
Fri Jan 11 12:39:33 PST 2013
Hello All,
Without sounding too optimistic, the plan is going like clockwork.
Fire was in and signed off their portion of the permit and i have
scheduled building for Monday so if we have no major glitches we should
be signed off late Monday and then the real work of qualing begins.Stay
tuned. Ted
On 1/11/2013 9:37 AM, maurice stevens wrote:
>
> Hi All,
>
> We haven't sent out a status update on the second chamber for a few
> months ...because there had not been anything new to report...until now.
>
> The permit has gone through the county (big cheer at this point) and
> we are now going through the follow up inspections.
>
> Ted had EH&S here this past Tuesday and they signed off on the system
> (smaller cheer here). Ted has the Fire inspector in today and if all
> goes well (there will be another big cheer and) then the building
> inspector will be here Monday.
>
> We can then turn on the gases to start temperature calibration and
> process development. We want to get a few recipes sent out for SIMS
> so we have clean baseline data.
>
> We will have an epi users meeting in the next few weeks to talk about
> how the two chambers share gas MFC's and what would be the best way to
> run two chambers at the same time.
>
> We are hopeful that Monday we will have good news.
>
> -m
>
>
>
>
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> epi2 at snf.stanford.edu
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