[epi2] Epi2: Second Chamber Update

Ted Berg tberg at stanford.edu
Fri Jan 11 12:39:33 PST 2013


Hello All,
     Without sounding too optimistic, the plan is going like clockwork. 
Fire was in and signed off their portion of the permit and i have 
scheduled building for Monday so if we have no major glitches we should 
be signed off late Monday and then the real work of qualing begins.Stay 
tuned. Ted

On 1/11/2013 9:37 AM, maurice stevens wrote:
>
> Hi All,
>
> We haven't sent out a status update on the second chamber for a few 
> months ...because there had not been anything new to report...until now.
>
> The permit has gone through the county (big cheer at this point) and 
> we are now going through the follow up inspections.
>
> Ted had EH&S here this past Tuesday and they signed off on the system 
> (smaller cheer here).  Ted has the Fire inspector in today and if all 
> goes well (there will be another big cheer and) then the building 
> inspector will be here Monday.
>
> We can then turn on the gases to start temperature calibration and 
> process development.  We want to get a few recipes sent out for SIMS 
> so we have clean baseline data.
>
> We will have an epi users meeting in the next few weeks to talk about 
> how the two chambers share gas MFC's and what would be the best way to 
> run two chambers at the same time.
>
> We are hopeful that Monday we will have good news.
>
> -m
>
>
>
>
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> epi2 at snf.stanford.edu
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