[epi2] Epi2: Second Chamber Update

Ted Berg tberg at stanford.edu
Mon Jan 14 12:56:36 PST 2013


Hello All,
     OK now we can be optimistic. I just had the last inspection and the 
permit is totally  signed off. Applied has a few checks to do and then 
the quals can begin. Ted



On 1/11/2013 12:39 PM, Ted Berg wrote:
Hello All,
>     Without sounding too optimistic, the plan is going like clockwork. 
> Fire was in and signed off their portion of the permit and i have 
> scheduled building for Monday so if we have no major glitches we 
> should be signed off late Monday and then the real work of qualing 
> begins.Stay tuned. Ted
>
> On 1/11/2013 9:37 AM, maurice stevens wrote:
>>
>> Hi All,
>>
>> We haven't sent out a status update on the second chamber for a few 
>> months ...because there had not been anything new to report...until now.
>>
>> The permit has gone through the county (big cheer at this point) and 
>> we are now going through the follow up inspections.
>>
>> Ted had EH&S here this past Tuesday and they signed off on the system 
>> (smaller cheer here).  Ted has the Fire inspector in today and if all 
>> goes well (there will be another big cheer and) then the building 
>> inspector will be here Monday.
>>
>> We can then turn on the gases to start temperature calibration and 
>> process development.  We want to get a few recipes sent out for SIMS 
>> so we have clean baseline data.
>>
>> We will have an epi users meeting in the next few weeks to talk about 
>> how the two chambers share gas MFC's and what would be the best way 
>> to run two chambers at the same time.
>>
>> We are hopeful that Monday we will have good news.
>>
>> -m
>>
>>
>>
>>
>> _______________________________________________
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>> epi2 at snf.stanford.edu
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>

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