[epi2] Epi2 update 1/18/13

maurice stevens maurice at stanford.edu
Fri Jan 18 15:41:06 PST 2013

Ted found the blower on the pump had kicked off.  Don't know why.  That is why system was not pumping down on Wed afternoon.

Today, the SIMS recipe is still giving a hazy surface.  So we are taking a step back and running an intrinsic Ge deposition (thank you Krishna for the recipe).

I have set the tool up to run several Ge deps and the several doped SiGe deps.  I'll come in over the weekend and check the runs.


More information about the epi2 mailing list