[epi2] Epi2 Chamber A update 1/23/13
maurice at stanford.edu
Wed Jan 23 14:43:50 PST 2013
We are still battle pressure issues. Initially the system was not pumping to 15 torr with process gases flowing. The pump was sent out the end of last week and we pulled the pump from Chamber B. We tried to run over the weekend but the pressure was not controlling…it would reach the 15 torr setpoint but would then oscillate out of control.
Today Ted had Sean from AMAT back in and they have ruled out the throttle valve. They did find that voltage coming off the pressure manometer is not stable. Sean has ordered a new manometer and expects it to be here tomorrow.
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