[epi2] Epi2: Update

Ted C. Berg tberg at stanford.edu
Tue Jan 29 16:51:18 PST 2013

   Hello once again. Still trying to keep all informed on status of epi.Pumps for chambers A and B were exchanged. this may have solved the pressure control issue for A. While troubleshooting chamber A's pressure issue we found a leak in a pump line and also at the rotation. The pump line has been ordered and the rotation leak addressed. We will do etches to try and cleanup A's dome once we have the pump line. It is coming from Germany and was ordered late last week.
    On to chamber B. The news is better here. we turned on HCl and DCS today and successfully ran Geetch coat B. Maurice will continue testing chamber B as we turn on the rest of the gases. As i said before Applied FS has been here every day to help resolve the issues. We appreciate your patience. Ted

----- Original Message -----
From: "Ted Berg" <tberg at stanford.edu>
To: "maurice stevens" <maurice at stanford.edu>
Cc: "Krishna Saraswat" <saraswat at cis.Stanford.EDU>, "Brett Huff" <bhuff at stanford.edu>, "David Miller" <dabm at ee.stanford.edu>, "James Harris" <harris at snow.stanford.edu>, "John Bumgarner" <jwb2005 at stanford.edu>, "Roger T. Howe" <rthowe at stanford.edu>, "epi2 mailing list" <epi2 at snf.stanford.edu>
Sent: Friday, January 25, 2013 7:22:49 AM
Subject: Re: [epi2] Epi2:  Update

Hello All,
      I just wanted to give everyone an update on where we are in Epi 
Land. Chamber B the second chamber is totally signed off by the county 
and Applied is doing some final checks. We hope to introduce gases today 
or Monday and then Maurice will do his Quals. On to Chamber A. The major 
PM with quartz and lamp change was accomplished by Applied Field 
service, we found the pump had died so it was replaced with a spare, 
system was leak checked and test runs were attempted to check for O2 
contamination. These did not succeed due to pressure control issues. We 
have been working on trying to resolve this issue with Applied Field 
service for several days. Sorry for the inconvenience. Will keep you all 
updated. Ted
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