From booth at snf.stanford.edu Tue Aug 6 09:56:46 2002 From: booth at snf.stanford.edu (Len Booth) Date: Tue, 06 Aug 2002 09:56:46 -0700 Subject: Morning Etch report 02/08/06 Message-ID: <3D4FFFCE.F9F3FA85@snf.stanford.edu> Etch Group - Morning Equipment Status Report Astrisk (*) = equipment up & ready for use AG4108 Problem each user needs to verify Config values values will change if power-cycled Problem Evelyn reported machine locked-up? AMTetcher Problem hexode rotation alarms, not affecting process Drytek1 * Drytek2 * Drytek4 * Lampoly Problem floppy disk not available, hard disk working Lamsi NOT installed Gasonics Shutdown waiting for process recipe(s) to be developed, Jim McVittie Matrix * MRC * Pquest * Prometrix * P5000etch * RTAag NOT installed work in-progress RTAgaas NOT installed RTM NOT installed STSetch * Wafersaw Shutdown Service/Training visit tenatively scheduled for this Friday 8/9 by repair tech. From booth at snf.stanford.edu Wed Aug 7 12:21:56 2002 From: booth at snf.stanford.edu (Len Booth) Date: Wed, 07 Aug 2002 12:21:56 -0700 Subject: Etch morning report Aug 7,2002 Message-ID: <3D517354.3413501D@snf.stanford.edu> Etch Group - Morning Equipment Status Report 12:20 pm Astrisk (*) = equipment up & ready for use AG4108 Problem each user needs to verify Config values values will change if power-cycled AMTetcher Shutdown tray #4 arced at latch Problem hexode rotation alarms, not affecting process Drytek1 * Problem chamber leak, Cesar scheduled repair time for tonight Drytek2 * Drytek4 * Lampoly Problem floppy disk not available, hard disk working Lamsi NOT installed Gasonics Shutdown waiting for process recipe(s) to be developed, Jim McVittie Matrix * MRC * Pquest * Prometrix * P5000etch Problem Wafer is lost in Ch C - Do NOT use Chamber C RTAag NOT installed work in-progress RTAgaas NOT installed RTM NOT installed STSetch * Wafersaw Shutdown Service/Training visit tenatively scheduled for this Friday 8/9 by repair tech. From booth at snf.stanford.edu Thu Aug 8 09:11:23 2002 From: booth at snf.stanford.edu (Len Booth) Date: Thu, 08 Aug 2002 09:11:23 -0700 Subject: Etch morning report Aug 8,2002 Message-ID: <3D52982B.E483720D@snf.stanford.edu> Etch Group - Morning Equipment Status Report 9:10 am Astrisk (*) = equipment up & ready for use AG4108 Problem each user needs to verify Config values values will change if power-cycled AMTetcher Problem hexode rotation alarms, not affecting process Drytek1 Shutdown chamber leak, gate valve needs to be repaired or replaced Drytek2 * Drytek4 * Lampoly Problem floppy disk not available, hard disk working Lamsi NOT installed Gasonics Shutdown waiting for process recipe(s) to be developed, Jim McVittie Matrix * MRC * Pquest * Prometrix * P5000etch * RTAag NOT installed work in-progress RTAgaas NOT installed RTM NOT installed STSetch * Wafersaw Shutdown Service/Training visit tenatively scheduled for this Friday 8/9 by repair tech. From booth at snf.stanford.edu Mon Aug 19 09:40:43 2002 From: booth at snf.stanford.edu (Len Booth) Date: Mon, 19 Aug 2002 09:40:43 -0700 Subject: Etch morning report Aug 19,2002 Message-ID: <3D611F8B.FFFA39A4@snf.stanford.edu> Etch Group - Morning Equipment Status Report 9:40 am Astrisk (*) = equipment up & ready for use AG4108 Problem each user needs to verify Config values values will change if power-cycled Shutdown software fault AMTetcher Problem hexode rotation alarms, not affecting process Drytek1 * Drytek2 * Drytek4 * Lampoly Problem floppy disk not available, hard disk working Lamsi NOT installed Gasonics Shutdown waiting for process recipe(s) to be developed, Jim McVittie Matrix * MRC * Pquest * Prometrix * P5000etch Problem intermittant hard disk faults repairs probably late this week RTAag NOT installed work in-progress RTAgaas NOT installed work in-progress RTM NOT installed STSetch * Wafersaw Shutdown Service/Training visit tenatively scheduled for this Tuesday 8/20 by repair tech. From booth at snf.stanford.edu Wed Aug 28 09:15:48 2002 From: booth at snf.stanford.edu (Len Booth) Date: Wed, 28 Aug 2002 09:15:48 -0700 Subject: Etch Morning report Aug 28, 2002 Message-ID: <3D6CF734.E69B5568@snf.stanford.edu> Etch Group - Morning Equipment Status Report 9:00 am Astrisk (*) = equipment up & ready for use AG4108 Problem each user needs to verify Config values values will change if power-cycled AMTetcher Problem hexode rotation alarms, not affecting process Drytek1 * Drytek2 * Drytek4 * Lampoly Problem floppy disk not available, hard disk working Shutdown LoadLock pump failing Lamsi NOT installed Gasonics Shutdown waiting for process recipe(s) to be developed, Jim McVittie Matrix Problem DC power supply needs to be replaced MRC * Pquest Shutdown wafer lift pin broken Prometrix * P5000etch * RTAag NOT installed work in-progress RTAgaas NOT installed work in-progress RTM NOT installed STSetch Problem load arm vibration, will replace parts soon scheduled with STS for tomorrow 8/29, but need to confirm Wafersaw *