Etch Morning Report Dec 2, 2002

[Len Booth]

Etch Group - Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     Problem     each user needs to verify Config values
                           values will change if power-cycled
                                              
AMTetcher  Problem     hexode rotation alarms, 
                           not affecting process
    
Drytek1    Shutdown    vane pump not working
                                              
Drytek2    *

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          developed, Jim McVittie
Lampoly    *

Lamsi      NOT installed
                                              
Matrix     Shutdown    cleaning broken wafer pieces
                                              
MRC        *
                                              
Pquest     Shutdown    burnbox sump pump failure
                                              
Prometrix  *    
                                              
P5000etch  *
                                              
RTAag      *   
                                              
RTAgaas    NOT installed        
                                            
STSetch    *