Etch Morning Report Nov 19, 2002

Len Booth booth at snf.stanford.edu
Tue Nov 19 09:16:54 PST 2002


Etch Group - Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     Problem     each user needs to verify Config values
                           values will change if power-cycled
                                              
AMTetcher  Problem     hexode rotation alarms, 
                           not affecting process
    
Drytek1    * 
                                              
Drytek2    Problem    slow initial chamber pumpdown

Drytek4    *     

Lampoly    *

Lamsi      NOT installed
                                              
Gasonics   Shutdown   waiting for process recipe(s) to be
                          developed, Jim McVittie
                                              
Matrix     *
                                              
MRC        *
                                              
Pquest     *
                                              
Prometrix  *    
                                              
P5000etch  *
                                              
RTAag      *        shutdown was cleared by Peter Griffin
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *



More information about the etch mailing list