From booth at snf.stanford.edu Tue Oct 1 08:26:36 2002 From: booth at snf.stanford.edu (Len Booth) Date: Tue, 01 Oct 2002 08:26:36 -0700 Subject: Etch Morning Report Oct 1, 2002 Message-ID: <3D99BEAC.428638FB@snf.stanford.edu> Etch Group - Morning Equipment Status Report 8:00 am Astrisk (*) = equipment up & ready for use AG4108 Problem each user needs to verify Config values values will change if power-cycled AMTetcher Problem hexode rotation alarms, not affecting process Drytek1 * Drytek2 * Drytek4 * Lampoly * Lamsi NOT installed Gasonics Shutdown waiting for process recipe(s) to be developed, Jim McVittie Matrix * MRC * Pquest * Prometrix * P5000etch * RTAag NOT installed work in-progress RTAgaas NOT installed work in-progress RTM NOT installed STSetch Shutdown load arm vibration, will replace parts Tuesday Oct 1 starting at 6am Wafersaw Shutdown severe water leak, parts here in a few days vendor has been asked to expedite shipment From booth at snf.stanford.edu Thu Oct 3 11:27:50 2002 From: booth at snf.stanford.edu (Len Booth) Date: Thu, 03 Oct 2002 11:27:50 -0700 Subject: Etch Morning Report Oct 3, 2002 Message-ID: <3D9C8C26.33FB1E5C@snf.stanford.edu> Etch Group - Morning Equipment Status Report 11:00 am Astrisk (*) = equipment up & ready for use AG4108 Problem each user needs to verify Config values values will change if power-cycled AMTetcher Problem hexode rotation alarms, not affecting process Drytek1 * Drytek2 * Drytek4 * Lampoly Shutdown pump maintenance Lamsi NOT installed Gasonics Shutdown waiting for process recipe(s) to be developed, Jim McVittie Matrix * MRC * Pquest * Prometrix * P5000etch * RTAag NOT installed work in-progress RTAgaas NOT installed work in-progress RTM NOT installed STSetch Shutdown STS has been working on repairs, but this is still in progress Wafersaw Shutdown severe water leak, parts here in a few days vendor has been asked to expedite shipment From booth at snf.stanford.edu Fri Oct 4 09:12:10 2002 From: booth at snf.stanford.edu (Len Booth) Date: Fri, 04 Oct 2002 09:12:10 -0700 Subject: Etch Morning Report Oct 4, 2002 Message-ID: <3D9DBDDA.36A8491F@snf.stanford.edu> Etch Group - Morning Equipment Status Report 9:00 am Astrisk (*) = equipment up & ready for use AG4108 Problem each user needs to verify Config values values will change if power-cycled AMTetcher Problem hexode rotation alarms, not affecting process Drytek1 * Drytek2 * Drytek4 * Lampoly * Lamsi NOT installed Gasonics Shutdown waiting for process recipe(s) to be developed, Jim McVittie Matrix * MRC * Pquest * Prometrix * P5000etch * RTAag NOT installed work in-progress RTAgaas NOT installed work in-progress RTM NOT installed STSetch * Wafersaw * From booth at snf.stanford.edu Tue Oct 8 08:55:39 2002 From: booth at snf.stanford.edu (Len Booth) Date: Tue, 08 Oct 2002 08:55:39 -0700 Subject: Etch Morning Report Oct 8, 2002 Message-ID: <3DA2FFFB.A2BEABAB@snf.stanford.edu> Etch Group - Morning Equipment Status Report 9:00 am Astrisk (*) = equipment up & ready for use AG4108 Problem each user needs to verify Config values values will change if power-cycled AMTetcher Problem hexode rotation alarms, not affecting process Drytek1 * Drytek2 * Drytek4 * Lampoly * Lamsi NOT installed Gasonics Shutdown waiting for process recipe(s) to be developed, Jim McVittie Matrix * MRC * Pquest * Prometrix * P5000etch * RTAag NOT installed work in-progress RTAgaas NOT installed work in-progress RTM NOT installed STSetch * Wafersaw * From booth at snf.stanford.edu Wed Oct 9 08:34:35 2002 From: booth at snf.stanford.edu (Len Booth) Date: Wed, 09 Oct 2002 08:34:35 -0700 Subject: Etch Morning Report Oct 9,2002 Message-ID: <3DA44C8B.1B250955@snf.stanford.edu> Etch Group - Morning Equipment Status Report 9:00 am Astrisk (*) = equipment up & ready for use AG4108 Problem each user needs to verify Config values values will change if power-cycled AMTetcher Problem hexode rotation alarms, not affecting process Drytek1 * Drytek2 * Drytek4 * Lampoly * Lamsi NOT installed Gasonics Shutdown waiting for process recipe(s) to be developed, Jim McVittie Matrix * MRC * Pquest * Prometrix * P5000etch * RTAag NOT installed work in-progress RTAgaas NOT installed work in-progress RTM NOT installed STSetch * Wafersaw * From booth at snf.stanford.edu Thu Oct 10 09:32:30 2002 From: booth at snf.stanford.edu (Len Booth) Date: Thu, 10 Oct 2002 09:32:30 -0700 Subject: Etch Morning Report Oct 10,2002 Message-ID: <3DA5AB9E.CD0100E7@snf.stanford.edu> Etch Group - Morning Equipment Status Report 9:30 am Astrisk (*) = equipment up & ready for use AG4108 Problem each user needs to verify Config values values will change if power-cycled AMTetcher Problem hexode rotation alarms, not affecting process Drytek1 * Drytek2 * Drytek4 * Lampoly * Lamsi NOT installed Gasonics Shutdown waiting for process recipe(s) to be developed, Jim McVittie Matrix * MRC * Pquest * Prometrix * P5000etch Shutdown LoadLock not venting properly RTAag NOT installed work in-progress RTAgaas NOT installed work in-progress RTM NOT installed STSetch * Wafersaw * From booth at snf.stanford.edu Fri Oct 11 09:32:51 2002 From: booth at snf.stanford.edu (Len Booth) Date: Fri, 11 Oct 2002 09:32:51 -0700 Subject: Etch Morning Report Oct 11, 2002 Message-ID: <3DA6FD33.6D20950E@snf.stanford.edu> Etch Group - Morning Equipment Status Report 9:30 am Astrisk (*) = equipment up & ready for use AG4108 Problem each user needs to verify Config values values will change if power-cycled AMTetcher Problem hexode rotation alarms, not affecting process Drytek1 * Drytek2 * Drytek4 * Lampoly * Lamsi NOT installed Gasonics Shutdown waiting for process recipe(s) to be developed, Jim McVittie Matrix * MRC * Pquest * Prometrix * P5000etch Shutdown LoadLock not venting properly Cooling lines broken RTAag NOT installed work in-progress RTAgaas NOT installed work in-progress RTM NOT installed STSetch * Wafersaw * From booth at snf.stanford.edu Mon Oct 14 07:39:15 2002 From: booth at snf.stanford.edu (Len Booth) Date: Mon, 14 Oct 2002 07:39:15 -0700 Subject: Etch Morning Report Message-ID: <3DAAD713.C40DAAFE@snf.stanford.edu> Etch Group - Morning Equipment Status Report 7:30 am Astrisk (*) = equipment up & ready for use AG4108 Problem each user needs to verify Config values values will change if power-cycled AMTetcher Problem hexode rotation alarms, not affecting process vacuum wand not working Drytek1 * Drytek2 * Drytek4 * Lampoly Shutdown DI resistivity fault Lamsi NOT installed Gasonics Shutdown waiting for process recipe(s) to be developed, Jim McVittie Matrix * MRC * Pquest * Prometrix * P5000etch Shutdown LoadLock not venting properly Cooling lines broken RTAag NOT installed work in-progress RTAgaas NOT installed work in-progress RTM NOT installed STSetch * Wafersaw * From booth at snf.stanford.edu Tue Oct 15 08:00:32 2002 From: booth at snf.stanford.edu (Len Booth) Date: Tue, 15 Oct 2002 08:00:32 -0700 Subject: Etch Morning Report Oct 15,2002 Message-ID: <3DAC2D90.1DFF4956@snf.stanford.edu> Etch Group - Morning Equipment Status Report 8:00 am Astrisk (*) = equipment up & ready for use AG4108 Problem each user needs to verify Config values values will change if power-cycled AMTetcher Problem hexode rotation alarms, not affecting process vacuum wand not working Drytek1 * Drytek2 * Drytek4 * Lampoly Shutdown electrode temperature controller fault Lamsi NOT installed Gasonics Shutdown waiting for process recipe(s) to be developed, Jim McVittie Matrix * MRC * Pquest * Prometrix * P5000etch Shutdown Cooling lines broken RTAag NOT installed work in-progress RTAgaas NOT installed work in-progress RTM NOT installed STSetch * Wafersaw * From booth at snf.stanford.edu Wed Oct 16 07:58:25 2002 From: booth at snf.stanford.edu (Len Booth) Date: Wed, 16 Oct 2002 07:58:25 -0700 Subject: Etch Morning Report Oct 16, 2002 Message-ID: <3DAD7E91.A7787CE1@snf.stanford.edu> Etch Group - Morning Equipment Status Report 8:00 am Astrisk (*) = equipment up & ready for use AG4108 Problem each user needs to verify Config values values will change if power-cycled AMTetcher Problem hexode rotation alarms, not affecting process Drytek1 * Drytek2 * Drytek4 * Lampoly Shutdown electrode temperature controller fault Lamsi NOT installed Gasonics Shutdown waiting for process recipe(s) to be developed, Jim McVittie Matrix * MRC * Pquest * Prometrix * P5000etch Shutdown Cooling lines broken RTAag NOT installed work in-progress RTAgaas NOT installed work in-progress RTM NOT installed STSetch * Wafersaw * From booth at snf.stanford.edu Thu Oct 17 08:53:16 2002 From: booth at snf.stanford.edu (Len Booth) Date: Thu, 17 Oct 2002 08:53:16 -0700 Subject: Etch Morning Report Oct 17, 2002 Message-ID: <3DAEDCEC.D23BCE02@snf.stanford.edu> Etch Group - Morning Equipment Status Report 9:00 am Astrisk (*) = equipment up & ready for use AG4108 Problem each user needs to verify Config values values will change if power-cycled AMTetcher Problem hexode rotation alarms, not affecting process Drytek1 * Drytek2 * Drytek4 * Lampoly Shutdown electrode temperature controller fault Lamsi NOT installed Gasonics Shutdown waiting for process recipe(s) to be developed, Jim McVittie Matrix * MRC * Pquest * Prometrix * P5000etch Shutdown Cooling lines broken Chamber B chiller failed RTAag NOT installed work in-progress RTAgaas NOT installed work in-progress RTM NOT installed STSetch * Wafersaw * From booth at snf.stanford.edu Fri Oct 18 08:51:57 2002 From: booth at snf.stanford.edu (Len Booth) Date: Fri, 18 Oct 2002 08:51:57 -0700 Subject: Etch Morning Report Oct 18,2002 Message-ID: <3DB02E1D.AE27538B@snf.stanford.edu> Etch Group - Morning Equipment Status Report 9:00 am Astrisk (*) = equipment up & ready for use AG4108 Problem each user needs to verify Config values values will change if power-cycled AMTetcher Problem hexode rotation alarms, not affecting process Drytek1 * Drytek2 * Drytek4 * Lampoly Shutdown electrode temperature controller fault Lamsi NOT installed Gasonics Shutdown waiting for process recipe(s) to be developed, Jim McVittie Matrix * MRC * Pquest * Prometrix * P5000etch * RTAag NOT installed work in-progress RTAgaas NOT installed work in-progress RTM NOT installed STSetch * Wafersaw * From booth at snf.stanford.edu Mon Oct 21 08:33:37 2002 From: booth at snf.stanford.edu (Len Booth) Date: Mon, 21 Oct 2002 08:33:37 -0700 Subject: Etch Morning Report Oct 21, 2002 Message-ID: <3DB41E51.913570C6@snf.stanford.edu> Etch Group - Morning Equipment Status Report 9:00 am Astrisk (*) = equipment up & ready for use AG4108 Problem each user needs to verify Config values values will change if power-cycled AMTetcher Problem hexode rotation alarms, not affecting process Drytek1 * Drytek2 * Drytek4 * Lampoly Shutdown electrode temperature controller fault LoadLock pump out for repair Lamsi NOT installed Gasonics Shutdown waiting for process recipe(s) to be developed, Jim McVittie Matrix * MRC * Pquest * Prometrix * P5000etch * RTAag NOT installed work in-progress RTAgaas NOT installed work in-progress RTM NOT installed STSetch * Wafersaw * From booth at snf.stanford.edu Tue Oct 22 08:45:03 2002 From: booth at snf.stanford.edu (Len Booth) Date: Tue, 22 Oct 2002 08:45:03 -0700 Subject: Etch Morning Report Oct 22, 2002 Message-ID: <3DB5727F.902F9BB@snf.stanford.edu> Etch Group - Morning Equipment Status Report 9:00 am Astrisk (*) = equipment up & ready for use AG4108 Problem each user needs to verify Config values values will change if power-cycled AMTetcher Problem hexode rotation alarms, not affecting process Drytek1 * Drytek2 * Drytek4 * Lampoly Shutdown electrode temperature controller fault LoadLock pump out for repair Lamsi NOT installed Gasonics Shutdown waiting for process recipe(s) to be developed, Jim McVittie Matrix * MRC * Pquest * Prometrix * P5000etch * RTAag NOT installed work in-progress RTAgaas NOT installed work in-progress RTM NOT installed STSetch * Wafersaw * From booth at snf.stanford.edu Wed Oct 23 08:45:57 2002 From: booth at snf.stanford.edu (Len Booth) Date: Wed, 23 Oct 2002 08:45:57 -0700 Subject: Etch Morning Report Oct 23, 2002 Message-ID: <3DB6C435.FF154C01@snf.stanford.edu> Etch Group - Morning Equipment Status Report 9:00 am Astrisk (*) = equipment up & ready for use AG4108 Problem each user needs to verify Config values values will change if power-cycled AMTetcher Problem hexode rotation alarms, not affecting process Drytek1 * Drytek2 * Drytek4 * Lampoly Shutdown electrode temperature controller fault LoadLock pump out for repair Lamsi NOT installed Gasonics Shutdown waiting for process recipe(s) to be developed, Jim McVittie Matrix * MRC * Pquest * Prometrix * P5000etch * RTAag NOT installed work in-progress RTAgaas NOT installed work in-progress RTM NOT installed STSetch * Wafersaw * From booth at snf.stanford.edu Thu Oct 24 08:21:27 2002 From: booth at snf.stanford.edu (Len Booth) Date: Thu, 24 Oct 2002 08:21:27 -0700 Subject: Etch Morning Report Oct 24, 2002 Message-ID: <3DB80FF7.B63DB4F1@snf.stanford.edu> Etch Group - Morning Equipment Status Report 9:00 am Astrisk (*) = equipment up & ready for use AG4108 Problem each user needs to verify Config values values will change if power-cycled AMTetcher Problem hexode rotation alarms, not affecting process Drytek1 * Drytek2 * Drytek4 * Lampoly Shutdown electrode temperature controller fault LoadLock pump out for repair Lamsi NOT installed Gasonics Shutdown waiting for process recipe(s) to be developed, Jim McVittie Matrix * MRC * Pquest * Prometrix * P5000etch * RTAag NOT installed work in-progress RTAgaas NOT installed work in-progress RTM NOT installed STSetch * Wafersaw * From booth at snf.stanford.edu Fri Oct 25 08:41:47 2002 From: booth at snf.stanford.edu (Len Booth) Date: Fri, 25 Oct 2002 08:41:47 -0700 Subject: Etch Morning Report Oct 25,2002 Message-ID: <3DB9663B.D9ED8DD0@snf.stanford.edu> Etch Group - Morning Equipment Status Report 9:00 am Astrisk (*) = equipment up & ready for use AG4108 Problem each user needs to verify Config values values will change if power-cycled AMTetcher Problem hexode rotation alarms, not affecting process Drytek1 * Drytek2 * Drytek4 * Lampoly Shutdown electrode temperature controller fault LoadLock pump out for repair best estimate for completion of repairs is next Tuesday 10/29 Lamsi NOT installed Gasonics Shutdown waiting for process recipe(s) to be developed, Jim McVittie Matrix * MRC * Pquest * Prometrix * P5000etch * RTAag NOT installed work in-progress RTAgaas NOT installed work in-progress RTM NOT installed STSetch * Wafersaw * From booth at snf.stanford.edu Mon Oct 28 09:09:06 2002 From: booth at snf.stanford.edu (Len Booth) Date: Mon, 28 Oct 2002 09:09:06 -0800 Subject: Etch Morning Report Oct 28, 2002 Message-ID: <3DBD6F32.2F1B8891@snf.stanford.edu> Etch Group - Morning Equipment Status Report 9:00 am Astrisk (*) = equipment up & ready for use AG4108 Problem each user needs to verify Config values values will change if power-cycled AMTetcher Problem hexode rotation alarms, not affecting process Drytek1 * Drytek2 * Drytek4 * Lampoly Shutdown electrode temperature controller fault LoadLock pump out for repair best estimate for completion of repairs is next Thursday 10/31 Lamsi NOT installed Gasonics Shutdown waiting for process recipe(s) to be developed, Jim McVittie Matrix * MRC * Pquest * Prometrix * P5000etch * RTAag NOT installed work in-progress RTAgaas NOT installed work in-progress RTM NOT installed STSetch * Wafersaw * From booth at snf.stanford.edu Tue Oct 29 08:47:14 2002 From: booth at snf.stanford.edu (Len Booth) Date: Tue, 29 Oct 2002 08:47:14 -0800 Subject: Etch Morning Report Oct 29, 2002 Message-ID: <3DBEBB91.65E484D0@snf.stanford.edu> Etch Group - Morning Equipment Status Report 9:00 am Astrisk (*) = equipment up & ready for use AG4108 Problem each user needs to verify Config values values will change if power-cycled AMTetcher Problem hexode rotation alarms, not affecting process Drytek1 * Drytek2 * Drytek4 * Lampoly Shutdown electrode temperature controller fault LoadLock pump out for repair best estimate for completion of repairs is Thursday 10/31 Lamsi NOT installed Gasonics Shutdown waiting for process recipe(s) to be developed, Jim McVittie Matrix * MRC * Pquest * Prometrix * P5000etch * RTAag NOT installed work in-progress RTAgaas NOT installed work in-progress STSetch * Wafersaw * From booth at snf.stanford.edu Wed Oct 30 08:47:42 2002 From: booth at snf.stanford.edu (Len Booth) Date: Wed, 30 Oct 2002 08:47:42 -0800 Subject: Etch Morning Report Oct 30, 2002 Message-ID: <3DC00D2E.E3CFA481@snf.stanford.edu> Etch Group - Morning Equipment Status Report 9:00 am Astrisk (*) = equipment up & ready for use AG4108 Problem each user needs to verify Config values values will change if power-cycled AMTetcher Problem hexode rotation alarms, not affecting process Drytek1 * Drytek2 * Drytek4 * Lampoly Shutdown electrode temperature controller fault LoadLock pump out for repair best estimate for completion of repairs is Thursday 10/31 Lamsi NOT installed Gasonics Shutdown waiting for process recipe(s) to be developed, Jim McVittie Matrix * MRC * Pquest * Prometrix * P5000etch * RTAag NOT installed work in-progress RTAgaas NOT installed work in-progress STSetch * Wafersaw * From booth at snf.stanford.edu Thu Oct 31 09:09:17 2002 From: booth at snf.stanford.edu (Len Booth) Date: Thu, 31 Oct 2002 09:09:17 -0800 Subject: Etch Morning Report Oct 31, 2002 Message-ID: <3DC163BD.7A573D9E@snf.stanford.edu> Etch Group - Morning Equipment Status Report 9:00 am Astrisk (*) = equipment up & ready for use AG4108 Problem each user needs to verify Config values values will change if power-cycled AMTetcher Problem hexode rotation alarms, not affecting process Drytek1 * Drytek2 * Drytek4 * Lampoly Shutdown electrode temperature controller fault best estimate for completion of repairs is Thursday 10/31 Lamsi NOT installed Gasonics Shutdown waiting for process recipe(s) to be developed, Jim McVittie Matrix * MRC * Pquest * Prometrix * P5000etch * RTAag NOT installed work in-progress RTAgaas NOT installed work in-progress STSetch * Wafersaw *