Etch Morning Report Oct 1, 2002

Len Booth booth at snf.stanford.edu
Tue Oct 1 08:26:36 PDT 2002


Etch Group - Morning Equipment Status Report 8:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     Problem     each user needs to verify Config values
                           values will change if power-cycled
                                              
AMTetcher  Problem     hexode rotation alarms, 
                           not affecting process
    
Drytek1    * 
                                              
Drytek2    *

Drytek4    *     

Lampoly    * 

Lamsi      NOT installed
                                              
Gasonics   Shutdown   waiting for process recipe(s) to be
                          developed, Jim McVittie
                                              
Matrix     *
                                              
MRC        *
                                              
Pquest     * 
                                              
Prometrix  *    
                                              
P5000etch  *
                                              
RTAag      NOT installed        work in-progress
                                              
RTAgaas    NOT installed        work in-progress
                                              
RTM        NOT installed
                                              
STSetch    Shutdown   load arm vibration, will replace parts 
                     Tuesday Oct 1 starting at 6am

Wafersaw   Shutdown  severe water leak, parts here in a few days
                     vendor has been asked to expedite shipment



More information about the etch mailing list