Etch Morning Report

Len Booth booth at
Mon Oct 14 07:39:15 PDT 2002

Etch Group - Morning Equipment Status Report 7:30 am
  Astrisk (*) = equipment up & ready for use
AG4108     Problem     each user needs to verify Config values
                           values will change if power-cycled
AMTetcher  Problem     hexode rotation alarms, 
                           not affecting process

                       vacuum wand not working
Drytek1    * 
Drytek2    *

Drytek4    *     

Lampoly    Shutdown    DI resistivity fault 

Lamsi      NOT installed
Gasonics   Shutdown   waiting for process recipe(s) to be
                          developed, Jim McVittie
Matrix     *
MRC        *
Pquest     * 
Prometrix  *    
P5000etch  Shutdown    LoadLock not venting properly
                       Cooling lines broken
RTAag      NOT installed        work in-progress
RTAgaas    NOT installed        work in-progress
RTM        NOT installed
STSetch    *

Wafersaw   *

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