Etch Morning Report

[Len Booth]

Etch Group - Morning Equipment Status Report 7:30 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     Problem     each user needs to verify Config values
                           values will change if power-cycled
                                              
AMTetcher  Problem     hexode rotation alarms, 
                           not affecting process

                       vacuum wand not working
    
Drytek1    * 
                                              
Drytek2    *

Drytek4    *     

Lampoly    Shutdown    DI resistivity fault 

Lamsi      NOT installed
                                              
Gasonics   Shutdown   waiting for process recipe(s) to be
                          developed, Jim McVittie
                                              
Matrix     *
                                              
MRC        *
                                              
Pquest     * 
                                              
Prometrix  *    
                                              
P5000etch  Shutdown    LoadLock not venting properly
                       Cooling lines broken
                                              
RTAag      NOT installed        work in-progress
                                              
RTAgaas    NOT installed        work in-progress
                                              
RTM        NOT installed
                                              
STSetch    *

Wafersaw   *