Etch Morning Report Oct 30, 2002

Len Booth booth at
Wed Oct 30 08:47:42 PST 2002

Etch Group - Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
AG4108     Problem     each user needs to verify Config values
                           values will change if power-cycled
AMTetcher  Problem     hexode rotation alarms, 
                           not affecting process
Drytek1    * 
Drytek2    *

Drytek4    *     

Lampoly    Shutdown    electrode temperature controller fault 
                       LoadLock pump out for repair

                        best estimate for completion of repairs
                        is Thursday  10/31

Lamsi      NOT installed
Gasonics   Shutdown   waiting for process recipe(s) to be
                          developed, Jim McVittie
Matrix     *
MRC        *
Pquest     * 
Prometrix  *    
P5000etch  *
RTAag      NOT installed        work in-progress
RTAgaas    NOT installed        work in-progress
STSetch    *

Wafersaw   *

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