From booth at snf.stanford.edu Tue Sep 10 12:41:23 2002 From: booth at snf.stanford.edu (Len Booth) Date: Tue, 10 Sep 2002 12:41:23 -0700 Subject: Etch Morning Report Sept 10,2002 Message-ID: <3D7E4AE3.E4BF6045@snf.stanford.edu> Etch Group - Morning Equipment Status Report 12:30 pm Astrisk (*) = equipment up & ready for use AG4108 Problem each user needs to verify Config values values will change if power-cycled AMTetcher Problem hexode rotation alarms, not affecting process Drytek1 * Drytek2 Problem electrodes need to be checked for water leak top electrode needs to be aligned to allow laser beam through Drytek4 * Lampoly Problem new hard disk working, recipes not installed yet, getting parts tomorrow, expect full operation Thursday Shutdown LoadLock pump failing Lamsi NOT installed Gasonics Shutdown waiting for process recipe(s) to be developed, Jim McVittie Matrix * MRC * Pquest * Prometrix * P5000etch Problem wafer broken in ch C RTAag NOT installed work in-progress RTAgaas NOT installed work in-progress RTM NOT installed STSetch Problem load arm vibration, will replace parts soon Wafersaw * From booth at snf.stanford.edu Wed Sep 11 09:23:11 2002 From: booth at snf.stanford.edu (Len Booth) Date: Wed, 11 Sep 2002 09:23:11 -0700 Subject: Etch Morning Report Sept 11,2002 Message-ID: <3D7F6DEF.E07510F2@snf.stanford.edu> Etch Group - Morning Equipment Status Report 9:30 am Astrisk (*) = equipment up & ready for use AG4108 Problem each user needs to verify Config values values will change if power-cycled AMTetcher Problem hexode rotation alarms, not affecting process Drytek1 * Drytek2 Problem electrodes need to be checked for water leak top electrode needs to be aligned to allow laser beam through Drytek4 * Lampoly Problem new hard disk working, recipes not installed yet, parts picked up this morning, expect full operation Thursday Shutdown LoadLock pump failing Lamsi NOT installed Gasonics Shutdown waiting for process recipe(s) to be developed, Jim McVittie Matrix * MRC * Pquest * Prometrix * P5000etch * RTAag NOT installed work in-progress RTAgaas NOT installed work in-progress RTM NOT installed STSetch Problem load arm vibration, will replace parts soon From booth at snf.stanford.edu Thu Sep 12 08:55:47 2002 From: booth at snf.stanford.edu (Len Booth) Date: Thu, 12 Sep 2002 08:55:47 -0700 Subject: Etch Morning Report Sept 12, 2002 Message-ID: <3D80B903.74A35C23@snf.stanford.edu> Etch Group - Morning Equipment Status Report 9:00 am Astrisk (*) = equipment up & ready for use AG4108 Problem each user needs to verify Config values values will change if power-cycled AMTetcher Problem hexode rotation alarms, not affecting process Drytek1 * Drytek2 * Drytek4 * Lampoly Problem ready for process verification (Henry) Lamsi NOT installed Gasonics Shutdown waiting for process recipe(s) to be developed, Jim McVittie Matrix * MRC * Pquest * Prometrix * P5000etch * RTAag NOT installed work in-progress RTAgaas NOT installed work in-progress RTM NOT installed STSetch Problem load arm vibration, will replace parts soon Wafersaw Shutdown severe water leak From booth at snf.stanford.edu Fri Sep 13 11:17:18 2002 From: booth at snf.stanford.edu (Len Booth) Date: Fri, 13 Sep 2002 11:17:18 -0700 Subject: Etch Morning Report Sept 13,2002 Message-ID: <3D822BAE.F95B67B9@snf.stanford.edu> Etch Group - Morning Equipment Status Report 11:00 am Astrisk (*) = equipment up & ready for use AG4108 Problem each user needs to verify Config values values will change if power-cycled AMTetcher Problem hexode rotation alarms, not affecting process Drytek1 * Drytek2 * Drytek4 * Lampoly * Lamsi NOT installed Gasonics Shutdown waiting for process recipe(s) to be developed, Jim McVittie Matrix * MRC * Pquest * Prometrix * P5000etch * RTAag NOT installed work in-progress RTAgaas NOT installed work in-progress RTM NOT installed STSetch Problem load arm vibration, will replace parts soon Wafersaw Shutdown severe water leak, locating parts From booth at snf.stanford.edu Mon Sep 16 08:42:17 2002 From: booth at snf.stanford.edu (Len Booth) Date: Mon, 16 Sep 2002 08:42:17 -0700 Subject: Etch Morning Report Sept 16,2002 Message-ID: <3D85FBD9.7F8785F9@snf.stanford.edu> Etch Group - Morning Equipment Status Report 11:00 am Astrisk (*) = equipment up & ready for use AG4108 Problem each user needs to verify Config values values will change if power-cycled AMTetcher Problem hexode rotation alarms, not affecting process Drytek1 * Drytek2 * Drytek4 * Lampoly * Lamsi NOT installed Gasonics Shutdown waiting for process recipe(s) to be developed, Jim McVittie Matrix * MRC * Pquest * Prometrix * P5000etch * RTAag NOT installed work in-progress RTAgaas NOT installed work in-progress RTM NOT installed STSetch Problem load arm vibration, will replace parts soon Wafersaw Shutdown severe water leak, parts here in about 5 days From booth at snf.stanford.edu Wed Sep 18 08:58:26 2002 From: booth at snf.stanford.edu (Len Booth) Date: Wed, 18 Sep 2002 08:58:26 -0700 Subject: Etch morning report Sept 18,2002 Message-ID: <3D88A2A2.2CE6A50F@snf.stanford.edu> Etch Group - Morning Equipment Status Report 9:00 am Astrisk (*) = equipment up & ready for use AG4108 Problem each user needs to verify Config values values will change if power-cycled AMTetcher Problem hexode rotation alarms, not affecting process Drytek1 * Drytek2 * Drytek4 * Lampoly * Lamsi NOT installed Gasonics Shutdown waiting for process recipe(s) to be developed, Jim McVittie Matrix * MRC Shutdown electrical maitnenance today Pquest Shutdown electrical maitnenance today Prometrix * P5000etch Shutdown electrical maitnenance today RTAag NOT installed work in-progress RTAgaas NOT installed work in-progress RTM NOT installed STSetch Problem load arm vibration, will replace parts soon Wafersaw Shutdown severe water leak, parts here in about 4 days From booth at snf.stanford.edu Thu Sep 19 09:24:12 2002 From: booth at snf.stanford.edu (Len Booth) Date: Thu, 19 Sep 2002 09:24:12 -0700 Subject: Etch Morning Report Sept 19,2002 Message-ID: <3D89FA2C.AD032E69@snf.stanford.edu> Etch Group - Morning Equipment Status Report 9:00 am Astrisk (*) = equipment up & ready for use AG4108 Problem each user needs to verify Config values values will change if power-cycled AMTetcher Problem hexode rotation alarms, not affecting process Drytek1 * Drytek2 * Drytek4 * Lampoly * Lamsi NOT installed Gasonics Shutdown waiting for process recipe(s) to be developed, Jim McVittie Matrix * MRC * Pquest * Prometrix * P5000etch * RTAag NOT installed work in-progress RTAgaas NOT installed work in-progress RTM NOT installed STSetch Problem load arm vibration, will replace parts soon Wafersaw Shutdown severe water leak, parts here in about 3 days From booth at snf.stanford.edu Fri Sep 20 08:45:04 2002 From: booth at snf.stanford.edu (Len Booth) Date: Fri, 20 Sep 2002 08:45:04 -0700 Subject: Etch Morning Report Sept 20,2002 Message-ID: <3D8B4280.305A960A@snf.stanford.edu> Etch Group - Morning Equipment Status Report 9:00 am Astrisk (*) = equipment up & ready for use AG4108 Problem each user needs to verify Config values values will change if power-cycled AMTetcher Problem hexode rotation alarms, not affecting process Drytek1 * Drytek2 * Drytek4 * Lampoly * Lamsi NOT installed Gasonics Shutdown waiting for process recipe(s) to be developed, Jim McVittie Matrix * MRC * Pquest * Prometrix * P5000etch * RTAag NOT installed work in-progress RTAgaas NOT installed work in-progress RTM NOT installed STSetch Problem load arm vibration, will replace parts soon Wafersaw Shutdown severe water leak, parts here in about 2 days From booth at snf.stanford.edu Tue Sep 24 09:04:44 2002 From: booth at snf.stanford.edu (Len Booth) Date: Tue, 24 Sep 2002 09:04:44 -0700 Subject: Etch morning report Sept 24,2002 Message-ID: <3D908D1C.57101C67@snf.stanford.edu> Etch Group - Morning Equipment Status Report 9:00 am Astrisk (*) = equipment up & ready for use AG4108 Problem each user needs to verify Config values values will change if power-cycled AMTetcher Problem hexode rotation alarms, not affecting process Drytek1 * Drytek2 Problem probable water/vacuum leaks, maint scheduled Wed nite & Thursday Drytek4 * Lampoly * Lamsi NOT installed Gasonics Shutdown waiting for process recipe(s) to be developed, Jim McVittie Matrix * MRC * Pquest * Prometrix * P5000etch * RTAag NOT installed work in-progress RTAgaas NOT installed work in-progress RTM NOT installed STSetch Problem load arm vibration, will replace parts soon Wafersaw Shutdown severe water leak, parts here in a few days From booth at snf.stanford.edu Wed Sep 25 09:11:53 2002 From: booth at snf.stanford.edu (Len Booth) Date: Wed, 25 Sep 2002 09:11:53 -0700 Subject: Etch Morning Report Sept 25, 2002 Message-ID: <3D91E049.F8137F27@snf.stanford.edu> Etch Group - Morning Equipment Status Report 9:00 am Astrisk (*) = equipment up & ready for use AG4108 Problem each user needs to verify Config values values will change if power-cycled AMTetcher Problem hexode rotation alarms, not affecting process Drytek1 * Drytek2 Problem probable water/vacuum leaks, maint scheduled Wed nite & Thursday Drytek4 * Lampoly * Lamsi NOT installed Gasonics Shutdown waiting for process recipe(s) to be developed, Jim McVittie Matrix * MRC * Pquest * Prometrix * P5000etch * RTAag NOT installed work in-progress RTAgaas NOT installed work in-progress RTM NOT installed STSetch Problem load arm vibration, will replace parts soon waiting for schedule from ST Systems Wafersaw Shutdown severe water leak, parts here in a few days vendor has been asked to expedite shipment From booth at snf.stanford.edu Thu Sep 26 08:59:32 2002 From: booth at snf.stanford.edu (Len Booth) Date: Thu, 26 Sep 2002 08:59:32 -0700 Subject: Etch Morning Report Thurs Sept 26,2002 Message-ID: <3D932EE4.FACFDBDF@snf.stanford.edu> Etch Group - Morning Equipment Status Report 9:00 am Astrisk (*) = equipment up & ready for use AG4108 Problem each user needs to verify Config values values will change if power-cycled AMTetcher Problem hexode rotation alarms, not affecting process Drytek1 Shutdown pumping problem Drytek2 Shutdown probable water/vacuum leaks, maint scheduled Wed nite & Thursday Drytek4 * Lampoly * Lamsi NOT installed Gasonics Shutdown waiting for process recipe(s) to be developed, Jim McVittie Matrix * MRC * Pquest * Prometrix * P5000etch * RTAag NOT installed work in-progress RTAgaas NOT installed work in-progress RTM NOT installed STSetch Problem load arm vibration, will replace parts Tuesday Oct 1 starting at 6am Wafersaw Shutdown severe water leak, parts here in a few days vendor has been asked to expedite shipment From booth at snf.stanford.edu Mon Sep 30 07:44:59 2002 From: booth at snf.stanford.edu (Len Booth) Date: Mon, 30 Sep 2002 07:44:59 -0700 Subject: Etch Morning Report Message-ID: <3D98636B.BAA166F2@snf.stanford.edu> Etch Group - Morning Equipment Status Report 8:00 am Astrisk (*) = equipment up & ready for use AG4108 Problem each user needs to verify Config values values will change if power-cycled AMTetcher Problem hexode rotation alarms, not affecting process Drytek1 * Drytek2 Problem pumpdown is slower than normal, it does pump down temporarily adjusted base crossover pressure to 55mT Drytek4 * Lampoly * Lamsi NOT installed Gasonics Shutdown waiting for process recipe(s) to be developed, Jim McVittie Matrix * MRC * Pquest * Prometrix * P5000etch * RTAag NOT installed work in-progress RTAgaas NOT installed work in-progress RTM NOT installed STSetch Problem load arm vibration, will replace parts Tuesday Oct 1 starting at 6am Wafersaw Shutdown severe water leak, parts here in a few days vendor has been asked to expedite shipment