From booth at snf.stanford.edu  Tue Apr  1 08:23:06 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Tue, 01 Apr 2003 08:23:06 -0800
Subject: Etch Morning Report  Apr 1, 2003
Message-ID: <3E89BCEA.FD31DCEE@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                           values can change if power-cycled
                                              
AMTetcher  * 
    
Drytek1    *
                                              
Drytek2    *

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          developed, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  Problem    Chamber C  is SHUTDOWN
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *   
                                              
RTAgaas    NOT installed        
                                            
STSetch    *    

Wafersaw   *


From booth at snf.stanford.edu  Wed Apr  2 08:37:53 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Wed, 02 Apr 2003 08:37:53 -0800
Subject: Etch Morning Report  Apr 2, 2003
Message-ID: <3E8B11E1.1D943100@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                           values can change if power-cycled
                                              
AMTetcher  * 
    
Drytek1    *
                                              
Drytek2    *

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          developed, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *   
                                              
RTAgaas    NOT installed        
                                            
STSetch    *    

Wafersaw   *


From booth at snf.stanford.edu  Mon Apr  7 20:50:27 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Mon, 07 Apr 2003 20:50:27 -0700
Subject: Etch Morning Report  April 7,2003
Message-ID: <3E924703.667EA046@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                           values can change if power-cycled
                                              
AMTetcher  * 
    
Drytek1    *
                                              
Drytek2    *

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          developed, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *   
                                              
RTAgaas    NOT installed        
                                            
STSetch    *    

Wafersaw   *


From booth at snf.stanford.edu  Tue Apr  8 08:40:32 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Tue, 08 Apr 2003 08:40:32 -0700
Subject: Etch Morning Report  April 8, 2003
Message-ID: <3E92ED70.6386A959@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                           values can change if power-cycled
                                              
AMTetcher  * 
    
Drytek1    *
                                              
Drytek2    *

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          developed, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *   
                                              
RTAgaas    NOT installed        
                                            
STSetch    *    

Wafersaw   *


From booth at snf.stanford.edu  Thu Apr 10 09:00:22 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Thu, 10 Apr 2003 09:00:22 -0700
Subject: Etch Morning Report  April 10,2003
Message-ID: <3E959516.C6B8A07A@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                           values can change if power-cycled
                                              
AMTetcher  Shutdown   tray arcing, and pump maintenance
                      should be available late today
    
Drytek1    *
                                              
Drytek2    *

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          developed, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *   
                                              
RTAgaas    NOT installed        
                                            
STSetch    *    

Wafersaw   *


From booth at snf.stanford.edu  Fri Apr 11 09:22:11 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Fri, 11 Apr 2003 09:22:11 -0700
Subject: Etch Morning Report  April 11, 2003
Message-ID: <3E96EBB3.B0CFE82F@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                           values can change if power-cycled
                                              
AMTetcher  *

Drytek1    *
                                              
Drytek2    *

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *   
                                              
RTAgaas    NOT installed        
                                            
STSetch    Shutdown    broken wafer

Wafersaw   Shutdown


From booth at snf.stanford.edu  Mon Apr 14 09:01:04 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Mon, 14 Apr 2003 09:01:04 -0700
Subject: Etch Morning Report  April 14, 2003
Message-ID: <3E9ADB40.CB9E10B6@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                           values can change if power-cycled
                                              
AMTetcher  *

Drytek1    *
                                              
Drytek2    *

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    Shutdown   wafer transort not working

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  Shutdown for Chambr C    pump failure
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *   
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Tue Apr 15 09:00:29 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Tue, 15 Apr 2003 09:00:29 -0700
Subject: Etch Morning Report  Aptil 15, 2003
Message-ID: <3E9C2C9D.41EED5A3@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                           values can change if power-cycled
                                              
AMTetcher  *

Drytek1    *
                                              
Drytek2    *

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  Shutdown for Chambr C    pump failure
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *   
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Wed Apr 16 08:53:31 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Wed, 16 Apr 2003 08:53:31 -0700
Subject: Etch Morning Report  April 16, 2003
Message-ID: <3E9D7C7B.F2C9D5C9@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                           values can change if power-cycled
                                              
AMTetcher  *

Drytek1    *
                                              
Drytek2    *

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        Problem   SF6 flow & chamber pressure varies with 
                     STSetch process operation

P5000etch  Shutdown for Chambr C    pump failure
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *   
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Mon Apr 21 08:55:09 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Mon, 21 Apr 2003 08:55:09 -0700
Subject: Etch Morning Report  April 21, 2003
Message-ID: <3EA4145D.B1330B80@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                           values can change if power-cycled
                                              
AMTetcher  Shutdown   arcing needs to be repaired

Drytek1    *
                                              
Drytek2    *

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        Problem   SF6 flow unstable & chamber pressure 
                     varies with STSetch process operation

P5000etch  Shutdown for Chambr B    wafer lost in Chamber B
                                              
Pquest     Shutdown   broken wafer in etch chamber

Prometrix  *    
                                               
RTAag      Problem   recipe operating differently than before
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Tue Apr 22 09:04:30 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Tue, 22 Apr 2003 09:04:30 -0700
Subject: Etch Morning Report  April 22, 2003
Message-ID: <3EA5680E.B9AF3029@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                 values can change if power-cycled
                                              
AMTetcher  *

Drytek1    *
                                              
Drytek2    *

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        Problem   SF6 flow sometimes unstable & chamber pressure 
                     varies with some STSetch process operation

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      Problem   recipe operating differently than before
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Wed Apr 23 09:08:24 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Wed, 23 Apr 2003 09:08:24 -0700
Subject: Etch Morning Report  April 23, 2003
Message-ID: <3EA6BA78.109479DB@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                 values can change if power-cycled
                                              
AMTetcher  *

Drytek1    *
                                              
Drytek2    *

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     Shutdown   wafer transport error
                                              
MRC        Problem   SF6 flow sometimes unstable & chamber pressure 
                     varies with some STSetch process operation

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      Problem   recipe operating differently than before
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Thu Apr 24 08:58:55 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Thu, 24 Apr 2003 08:58:55 -0700
Subject: Etch Morning Report  April 24, 2003
Message-ID: <3EA809BF.D28A3261@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                 values can change if power-cycled
                                              
AMTetcher  *

Drytek1    *
                                              
Drytek2    *

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        Problem   SF6 flow sometimes unstable & chamber pressure 
                     varies with some STSetch process operation

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      Problem   recipe operating differently than before
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Fri Apr 25 08:59:24 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Fri, 25 Apr 2003 08:59:24 -0700
Subject: Etch Morning Report  April 25, 2003
Message-ID: <3EA95B5C.5DBCA6C0@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                 values can change if power-cycled
                                              
AMTetcher  *

Drytek1    *
                                              
Drytek2    *

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        Problem   SF6 flow sometimes unstable & chamber pressure 
                     varies with some STSetch process operation

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      Problem   recipe operating differently than before
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Mon Apr 28 08:24:03 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Mon, 28 Apr 2003 08:24:03 -0700
Subject: Etch Morning Report  April 28,2003
Message-ID: <3EAD4793.7B752130@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                 values can change if power-cycled
                                              
AMTetcher  *

Drytek1    *
                                              
Drytek2    *

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        Problem   SF6 flow sometimes unstable & chamber pressure 
                     varies with some STSetch process operation

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      Problem   recipe operating differently than before
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Tue Apr 29 08:30:47 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Tue, 29 Apr 2003 08:30:47 -0700
Subject: Etch Morning Report  April 29, 2003
Message-ID: <3EAE9AA7.A8A9E192@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                 values can change if power-cycled
                                              
AMTetcher  *

Drytek1    *
                                              
Drytek2    *

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        Problem   SF6 flow sometimes unstable & chamber pressure 
                     varies with some STSetch process operation

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      Problem   recipe operating differently than before
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Wed Apr 30 09:42:10 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Wed, 30 Apr 2003 09:42:10 -0700
Subject: Etch Morning Report  April 30, 2003
Message-ID: <3EAFFCE2.40310A2@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                 values can change if power-cycled
                                              
AMTetcher  *

Drytek1    *
                                              
Drytek2    *

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        Problem   SF6 flow sometimes unstable & chamber pressure 
                     varies with some STSetch process operation

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      Problem   recipe operating differently than before
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *