From booth at snf.stanford.edu  Fri Aug  1 08:37:14 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Fri, 01 Aug 2003 08:37:14 -0700
Subject: Etch Morning Report  Aug 1, 2003
Message-ID: <3F2A892A.5068320E@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                 values can change if power-cycled

           Ammonia flow problem reported, Do NOT use NH3 for now.
           NH3 source repairs scheduled for Tuesday Aug 5th
                                              
AMTetcher  *   

Drytek1    *         
                                              
Drytek2    *

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Tue Aug  5 08:25:16 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Tue, 05 Aug 2003 08:25:16 -0700
Subject: Etch Morning Report  Aug 05, 2003
Message-ID: <3F2FCC5C.F2B41C7C@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                 values can change if power-cycled

           Ammonia flow problem reported, Do NOT use NH3 for now.
           NH3 source repairs scheduled for Tuesday Aug 5th
                                              
AMTetcher  *   

Drytek1    *         
                                              
Drytek2    *

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Wed Aug  6 08:59:28 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Wed, 06 Aug 2003 08:59:28 -0700
Subject: Etch Morning Report  Aug 6, 2003
Message-ID: <3F3125DF.182DA345@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                 values can change if power-cycled

AMTetcher  *   

Drytek1    *         
                                              
Drytek2    *

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Fri Aug  8 09:13:36 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Fri, 08 Aug 2003 09:13:36 -0700
Subject: Etch Morning Report  Aug 8, 2003
Message-ID: <3F33CC30.E12F87AA@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                 values can change if power-cycled

AMTetcher  *   

Drytek1    *         
                                              
Drytek2    *

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    Problem   unstable backside Helium flow

Wafersaw   *   Plumbing work in back of saw today, but saw is usable


From booth at snf.stanford.edu  Mon Aug 11 08:38:00 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Mon, 11 Aug 2003 08:38:00 -0700
Subject: Etch Morning Report  Aug 11, 2003
Message-ID: <3F37B858.1FEF84A8@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                 values can change if power-cycled

AMTetcher  *   

Drytek1    *         
                                              
Drytek2    *

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *   Spindle bearing has been permanently changed from
               House Nitrogen to CDA, to conserve Nitrogen.


From booth at snf.stanford.edu  Tue Aug 12 09:13:01 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Tue, 12 Aug 2003 09:13:01 -0700
Subject: Etch Morning Report  Aug 12, 2003
Message-ID: <3F39120D.EC97B1FB@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                 values can change if power-cycled

AMTetcher  *   

Drytek1    *         
                                              
Drytek2    *

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *   Spindle bearing has been permanently changed from
               House Nitrogen to CDA, to conserve Nitrogen.


From booth at snf.stanford.edu  Wed Aug 13 08:45:13 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Wed, 13 Aug 2003 08:45:13 -0700
Subject: Etch Morning Report  Aug 13, 2003
Message-ID: <3F3A5D09.D761AA7F@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                 values can change if power-cycled

AMTetcher  *   

Drytek1    *         
                                              
Drytek2    *

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From help at rescuecharles.org  Mon Aug 18 17:05:11 2003
From: help at rescuecharles.org (help at rescuecharles.org)
Date: Mon, 18 Aug 2003 20:05:11 -0400
Subject: Rescue Charles Lee
Message-ID: <200308190005.h7J05Bq20834@ensim.rackshack.net>


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From booth at snf.stanford.edu  Wed Aug 20 08:48:53 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Wed, 20 Aug 2003 08:48:53 -0700
Subject: Etch Morning Report  Aug 20, 2003
Message-ID: <3F439865.9E1EB485@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                 values can change if power-cycled

AMTetcher  *   

Drytek1    *         
                                              
Drytek2    *

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Thu Aug 21 08:35:07 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Thu, 21 Aug 2003 08:35:07 -0700
Subject: Etch Morning Report  Aug 21, 2003
Message-ID: <3F44E6AB.FB301720@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                 values can change if power-cycled

AMTetcher  *   

Drytek1    *         
                                              
Drytek2    *

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Fri Aug 22 08:41:59 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Fri, 22 Aug 2003 08:41:59 -0700
Subject: Etch Morning Report  Fri Aug 22, 2003
Message-ID: <3F4639C7.FCA5129C@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                 values can change if power-cycled

AMTetcher  *   

Drytek1    *         
                                              
Drytek2    *   Maintenance this morning

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  Shutdown   report of wafer not sensed
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    Shutdown   cleaning up broken wafer

Wafersaw   *


From booth at snf.stanford.edu  Mon Aug 25 09:05:48 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Mon, 25 Aug 2003 09:05:48 -0700
Subject: Etch Morning Report  Aug 25, 2003
Message-ID: <3F4A33DC.154A1B1D@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                 values can change if power-cycled

AMTetcher  *   

Drytek1    *         
                                              
Drytek2    *   

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Wed Aug 27 08:26:49 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Wed, 27 Aug 2003 08:26:49 -0700
Subject: Etch Morning Report  Aug 27, 2003
Message-ID: <3F4CCDB9.C7AF589D@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                 values can change if power-cycled

AMTetcher  *   

Drytek1    *         
                                              
Drytek2    *   

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Thu Aug 28 08:32:43 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Thu, 28 Aug 2003 08:32:43 -0700
Subject: Etch Morning Report  Aug 28, 2003
Message-ID: <3F4E209B.CF67418F@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                 values can change if power-cycled

AMTetcher  *   

Drytek1    *         
                                              
Drytek2    *   

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *