Etch Morning Report Fri Aug 22, 2003

Len Booth booth at snf.stanford.edu
Fri Aug 22 08:41:59 PDT 2003


Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                 values can change if power-cycled

AMTetcher  *   

Drytek1    *         
                                              
Drytek2    *   Maintenance this morning

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  Shutdown   report of wafer not sensed
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    Shutdown   cleaning up broken wafer

Wafersaw   *



More information about the etch mailing list