From booth at snf.stanford.edu  Mon Dec  1 08:37:28 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Mon, 01 Dec 2003 08:37:28 -0800
Subject: Etch Morning Report  Dec 1, 2003
Message-ID: <3FCB6E48.57D8B5E5@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *    each user needs to verify Config values
                 values can change if power-cycled

AMTetcher  *

Drytek1    *         
                                              
Drytek2    *   

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved by Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Wed Dec  3 09:13:36 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Wed, 03 Dec 2003 09:13:36 -0800
Subject: Etch Morning Report  Dec 3, 2003
Message-ID: <3FCE19C0.8C6669A7@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *    each user needs to verify Config values
                 values can change if power-cycled

AMTetcher  Problem   reported DC bias has low reading

Drytek1    *         
                                              
Drytek2    *   

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved by Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Mon Dec  8 09:00:10 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Mon, 08 Dec 2003 09:00:10 -0800
Subject: Etch Morning Report  Dec 8, 2003
Message-ID: <3FD4AE1A.B4891B0@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *    each user needs to verify Config values
                 values can change if power-cycled

AMTetcher  Shutdown   reported arcing on several trays

Drytek1    *         
                                              
Drytek2    *   

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved by Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  Problem   Ch A is shutdown
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Tue Dec  9 09:08:44 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Tue, 09 Dec 2003 09:08:44 -0800
Subject: Etch Morning Report  Dec 9, 2003
Message-ID: <3FD6019C.17A9ABAF@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *    each user needs to verify Config values
                 values can change if power-cycled

AMTetcher  *

Drytek1    *         
                                              
Drytek2    *   

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved by Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  Problem   Ch A is shutdown
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Wed Dec 10 09:11:32 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Wed, 10 Dec 2003 09:11:32 -0800
Subject: Etch Morning Report  Dec 10, 2003
Message-ID: <3FD753C4.EBCD610C@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *    each user needs to verify Config values
                 values can change if power-cycled

AMTetcher  *

Drytek1    *         
                                              
Drytek2    *   

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved by Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  Problem   Ch A is shutdown
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Mon Dec 15 09:09:24 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Mon, 15 Dec 2003 09:09:24 -0800
Subject: Etch Morning Report  Dec 15, 2003
Message-ID: <3FDDEAC4.B595D663@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *    each user needs to verify Config values
                 values can change if power-cycled

AMTetcher  Shutdown   arcing reported by Linda W.

Drytek1    *         
                                              
Drytek2    *   

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved by Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    Shutdown   broken wafer pieces by yangxu

Wafersaw   *


From booth at snf.stanford.edu  Tue Dec 16 09:11:11 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Tue, 16 Dec 2003 09:11:11 -0800
Subject: Etch Morning Report  Dec 16, 2003
Message-ID: <3FDF3CAE.B8E807F8@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *    each user needs to verify Config values
                 values can change if power-cycled

AMTetcher  Shutdown   arcing reported by daesung

Drytek1    *         
                                              
Drytek2    *   

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved by Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Wed Dec 17 09:05:38 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Wed, 17 Dec 2003 09:05:38 -0800
Subject: Etch Morning Report  Dec 17, 2003
Message-ID: <3FE08CE2.81DBF65F@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *    each user needs to verify Config values
                 values can change if power-cycled

AMTetcher  Shutdown   Annual cleaning & Maintenance

Drytek1    *         
                                              
Drytek2    *   

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved by Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Thu Dec 18 09:11:57 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Thu, 18 Dec 2003 09:11:57 -0800
Subject: Etch Morning Report  Dec 18, 2003
Message-ID: <3FE1DFDD.9CD1B795@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *    each user needs to verify Config values
                 values can change if power-cycled

AMTetcher  Shutdown   Annual cleaning & Maintenance

Drytek1    *         
                                              
Drytek2    *   

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved by Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *