From booth at snf.stanford.edu  Fri Feb 14 08:44:12 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Fri, 14 Feb 2003 08:44:12 -0800
Subject: Etch Morning Report  Feb 14, 2003
Message-ID: <3E4D1CDC.A6A50685@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     Problem     each user needs to verify Config values
                           values will change if power-cycled
                                              
AMTetcher  * 
    
Drytek1    *
                                              
Drytek2    *

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          developed, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *   
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Tue Feb 18 08:59:27 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Tue, 18 Feb 2003 08:59:27 -0800
Subject: Etch Morning Report  Feb 18, 2003
Message-ID: <3E52666F.173B1CB1@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     Problem     each user needs to verify Config values
                           values will change if power-cycled
                                              
AMTetcher  * 
    
Drytek1    *
                                              
Drytek2    *

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          developed, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *   
                                              
RTAgaas    NOT installed        
                                            
STSetch    Shutdown    piece of broken wafer in etch chamber

Wafersaw   *


From booth at snf.stanford.edu  Wed Feb 19 08:28:57 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Wed, 19 Feb 2003 08:28:57 -0800
Subject: Etch Morning Report  Feb 19, 2003
Message-ID: <3E53B0C9.FAE1CC8B@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     Problem     each user needs to verify Config values
                           values will change if power-cycled
                                              
AMTetcher  * 
    
Drytek1    *
                                              
Drytek2    *

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          developed, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *   
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Thu Feb 20 08:49:11 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Thu, 20 Feb 2003 08:49:11 -0800
Subject: Etch Morning Report  Feb 20, 2003
Message-ID: <3E550707.39D31D36@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     Problem     each user needs to verify Config values
                           values will change if power-cycled
                                              
AMTetcher  * 
    
Drytek1    *
                                              
Drytek2    *

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          developed, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *   
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Mon Feb 24 08:58:15 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Mon, 24 Feb 2003 08:58:15 -0800
Subject: Etch Morning Report  Feb 24,2003
Message-ID: <3E5A4F27.DED28788@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     Problem     each user needs to verify Config values
                           values will change if power-cycled
                                              
AMTetcher  * 
    
Drytek1    *
                                              
Drytek2    *

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          developed, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *   
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Tue Feb 25 09:14:35 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Tue, 25 Feb 2003 09:14:35 -0800
Subject: Etch Morning Report  Feb 25, 2003
Message-ID: <3E5BA47B.FCBA9CD4@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     Problem     each user needs to verify Config values
                           values will change if power-cycled
                                              
AMTetcher  * 
    
Drytek1    *
                                              
Drytek2    *

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          developed, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *   
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Wed Feb 26 09:00:37 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Wed, 26 Feb 2003 09:00:37 -0800
Subject: Etch Morning Report  Feb 26, 2003
Message-ID: <3E5CF2B5.9578CC17@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     Problem     each user needs to verify Config values
                           values will change if power-cycled
                                              
AMTetcher  * 
    
Drytek1    *
                                              
Drytek2    *

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          developed, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *   
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Thu Feb 27 09:18:20 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Thu, 27 Feb 2003 09:18:20 -0800
Subject: Etch Morning Report  Feb 27,2003
Message-ID: <3E5E485C.58B156F7@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     Problem     each user needs to verify Config values
                           values will change if power-cycled
                                              
AMTetcher  * 
    
Drytek1    *
                                              
Drytek2    *

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          developed, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *   
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   Problem    intermittant poor video signal


From booth at snf.stanford.edu  Fri Feb 28 09:01:22 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Fri, 28 Feb 2003 09:01:22 -0800
Subject: Etch Morning Report  Feb 28, 2003
Message-ID: <3E5F95E2.18599754@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     Problem     each user needs to verify Config values
                           values will change if power-cycled
                                              
AMTetcher  * 
    
Drytek1    *
                                              
Drytek2    *

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          developed, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *   
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   Shutdown   failed video signal