Etch Morning Report Feb 18, 2003

[Len Booth]

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     Problem     each user needs to verify Config values
                           values will change if power-cycled
                                              
AMTetcher  * 
    
Drytek1    *
                                              
Drytek2    *

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          developed, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *   
                                              
RTAgaas    NOT installed        
                                            
STSetch    Shutdown    piece of broken wafer in etch chamber

Wafersaw   *