From booth at snf.stanford.edu  Thu Jan  2 09:05:41 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Thu, 02 Jan 2003 09:05:41 -0800
Subject: Etch Morning Report  Jan 02, 2003
Message-ID: <3E147165.8FF5FA20@snf.stanford.edu>

Etch Group - Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     Problem     each user needs to verify Config values
                           values will change if power-cycled
                                              
AMTetcher  Shutdown    maintenance 
    
Drytek1    *
                                              
Drytek2    Shutdown    maintenance & upgrade

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          developed, Jim McVittie
Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *
                                              
Pquest     Shutdown    burnbox sump pump 
                                              
Prometrix  *    
                                              
P5000etch  *
                                              
RTAag      *   
                                              
RTAgaas    NOT installed        
                                            
STSetch    *


From booth at snf.stanford.edu  Thu Jan  2 16:01:21 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Thu, 02 Jan 2003 16:01:21 -0800
Subject: Etch Afternoon Report  Jan 2, 2002
Message-ID: <3E14D2D1.74848000@snf.stanford.edu>

Etch Group -  Equipment Status Report 4:00 pm
  Astrisk (*) = equipment up & ready for use
                             
AG4108     Problem     each user needs to verify Config values
                           values will change if power-cycled
                                              
AMTetcher  Problem    can be used, but process not tested yet 
    
Drytek1    *
                                              
Drytek2    Shutdown    maintenance & upgrade

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          developed, Jim McVittie
Lampoly    Problem    can be used, but process not tested yet

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *
                                              
Pquest     Shutdown    burnbox sump pump (should be ready tomorrow noon)
                                              
Prometrix  *    
                                              
P5000etch  Problem    can be used, but process not tested yet
                                              
RTAag      *   
                                              
RTAgaas    NOT installed        
                                            
STSetch    Shutdown    welding for exhaust line not completed yet


From booth at snf.stanford.edu  Fri Jan  3 09:14:02 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Fri, 03 Jan 2003 09:14:02 -0800
Subject: Etch Morning Report  Jan 3, 2003  9am
Message-ID: <3E15C4DA.62C5BDF2@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     Problem     each user needs to verify Config values
                           values will change if power-cycled
                                              
AMTetcher  Problem    can be used, but process not tested yet 
    
Drytek1    *
                                              
Drytek2    Shutdown    maintenance & upgrade

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          developed, Jim McVittie

Lampoly    Problem    can be used, but process not tested yet

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  Problem    can be used, but process not tested yet
                                              
Pquest     Shutdown    burnbox sump pump (should be ready tomorrow noon)

Prometrix  *    
                                               
RTAag      *   
                                              
RTAgaas    NOT installed        
                                            
STSetch    Shutdown    welding for exhaust line not completed yet

Wafersaw   *


From booth at snf.stanford.edu  Mon Jan  6 08:45:10 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Mon, 06 Jan 2003 08:45:10 -0800
Subject: Etch Morning Report  Jan 6, 2003
Message-ID: <3E19B296.E5689933@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     Problem     each user needs to verify Config values
                           values will change if power-cycled
                                              
AMTetcher  Problem    can be used, but process not tested yet 
    
Drytek1    *
                                              
Drytek2    Shutdown    maintenance & upgrade

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          developed, Jim McVittie

Lampoly    Problem    can be used, but process not tested yet

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  Problem    can be used, but process not tested yet
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *   
                                              
RTAgaas    NOT installed        
                                            
STSetch    Shutdown    still has failurres

Wafersaw   *


From booth at snf.stanford.edu  Wed Jan  8 08:41:23 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Wed, 08 Jan 2003 08:41:23 -0800
Subject: Etch Morning Report  Jan 8, 2002
Message-ID: <3E1C54B3.D6D1EF47@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     Problem     each user needs to verify Config values
                           values will change if power-cycled
                                              
AMTetcher  * 
    
Drytek1    *
                                              
Drytek2    Shutdown    maintenance & upgrade

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          developed, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  Problem    can be used, but process not tested yet
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *   
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Thu Jan  9 09:03:04 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Thu, 09 Jan 2003 09:03:04 -0800
Subject: Etch Morning Report  Jan 9,2003
Message-ID: <3E1DAB48.84D99106@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     Problem     each user needs to verify Config values
                           values will change if power-cycled
                                              
AMTetcher  * 
    
Drytek1    *
                                              
Drytek2    Shutdown    maintenance & upgrade

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          developed, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  Problem    can be used, but process not tested yet
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *   
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Mon Jan 13 09:07:41 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Mon, 13 Jan 2003 09:07:41 -0800
Subject: Etch Morning Report  Jan 13,2003
Message-ID: <3E22F25D.8D32CF5F@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     Problem     each user needs to verify Config values
                           values will change if power-cycled
                                              
AMTetcher  * 
    
Drytek1    *
                                              
Drytek2    Shutdown    maintenance & upgrade
                       characterization is in progress

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          developed, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  Problem    can be used, but process not tested yet
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *   
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Tue Jan 14 09:08:45 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Tue, 14 Jan 2003 09:08:45 -0800
Subject: Etch Morning Report  Jan 14, 2003
Message-ID: <3E24441D.C54B5A64@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     Problem     each user needs to verify Config values
                           values will change if power-cycled
                                              
AMTetcher  * 
    
Drytek1    *
                                              
Drytek2    Shutdown    maintenance & upgrade
                       characterization is in progress

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          developed, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  Problem    can be used, but process not tested yet
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *   
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Wed Jan 15 09:08:46 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Wed, 15 Jan 2003 09:08:46 -0800
Subject: Etch Morning Report  Jan 15,2003
Message-ID: <3E25959E.AEBB310A@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     Problem     each user needs to verify Config values
                           values will change if power-cycled
                                              
AMTetcher  * 
    
Drytek1    *
                                              
Drytek2    Shutdown    maintenance & upgrade
                       characterization is in progress

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          developed, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  Problem    can be used, but process not tested yet
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *   
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Thu Jan 23 09:04:03 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Thu, 23 Jan 2003 09:04:03 -0800
Subject: Etch Morning Report  Jan 23, 2003
Message-ID: <3E302083.53F01864@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     Problem     each user needs to verify Config values
                           values will change if power-cycled
                                              
AMTetcher  * 
    
Drytek1    *
                                              
Drytek2    *

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          developed, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        Shutdown    cooling lines failed

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *   
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Fri Jan 24 09:02:58 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Fri, 24 Jan 2003 09:02:58 -0800
Subject: Etch Morning Report  Jan 24,2003
Message-ID: <3E3171C2.E4E38F7C@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     Problem     each user needs to verify Config values
                           values will change if power-cycled
                                              
AMTetcher  * 
    
Drytek1    *
                                              
Drytek2    *

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          developed, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        Shutdown    cooling lines failed

P5000etch  Shutdown    broken wafer
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *   
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Mon Jan 27 08:53:31 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Mon, 27 Jan 2003 08:53:31 -0800
Subject: Etch Morning Report  Jan 27, 2003
Message-ID: <3E35640B.1A05D71A@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     Problem     each user needs to verify Config values
                           values will change if power-cycled
                                              
AMTetcher  * 
    
Drytek1    *
                                              
Drytek2    *

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          developed, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *   
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Tue Jan 28 08:48:00 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Tue, 28 Jan 2003 08:48:00 -0800
Subject: Etch Morning Report  Jan 28,2003
Message-ID: <3E36B440.251E56DF@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     Problem     each user needs to verify Config values
                           values will change if power-cycled
                                              
AMTetcher  * 
    
Drytek1    *
                                              
Drytek2    *

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          developed, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *   
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Wed Jan 29 08:55:57 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Wed, 29 Jan 2003 08:55:57 -0800
Subject: Etch Morning Report  Jan 29,2003
Message-ID: <3E38079D.5C713278@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     Problem     each user needs to verify Config values
                           values will change if power-cycled
                                              
AMTetcher  * 
    
Drytek1    *
                                              
Drytek2    *

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          developed, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *   
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Thu Jan 30 08:48:46 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Thu, 30 Jan 2003 08:48:46 -0800
Subject: Etch Morning Report  Jan 30, 2003
Message-ID: <3E39576E.28BC8622@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     Problem     each user needs to verify Config values
                           values will change if power-cycled
                                              
AMTetcher  * 
    
Drytek1    *
                                              
Drytek2    *

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          developed, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *   
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Fri Jan 31 08:46:14 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Fri, 31 Jan 2003 08:46:14 -0800
Subject: Etch Morning Report  Jqn 31, 2003
Message-ID: <3E3AA856.BC210305@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     Problem     each user needs to verify Config values
                           values will change if power-cycled
                                              
AMTetcher  * 
    
Drytek1    *
                                              
Drytek2    *

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          developed, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *   
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *