Etch Morning Report Jan 02, 2003

Len Booth booth at
Thu Jan 2 09:05:41 PST 2003

Etch Group - Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
AG4108     Problem     each user needs to verify Config values
                           values will change if power-cycled
AMTetcher  Shutdown    maintenance 
Drytek1    *
Drytek2    Shutdown    maintenance & upgrade

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          developed, Jim McVittie
Lampoly    *

Lamsi      NOT installed
Matrix     *
MRC        *
Pquest     Shutdown    burnbox sump pump 
Prometrix  *    
P5000etch  *
RTAag      *   
RTAgaas    NOT installed        
STSetch    *

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