Etch Afternoon Report Jan 2, 2002

Len Booth booth at snf.stanford.edu
Thu Jan 2 16:01:21 PST 2003


Etch Group -  Equipment Status Report 4:00 pm
  Astrisk (*) = equipment up & ready for use
                             
AG4108     Problem     each user needs to verify Config values
                           values will change if power-cycled
                                              
AMTetcher  Problem    can be used, but process not tested yet 
    
Drytek1    *
                                              
Drytek2    Shutdown    maintenance & upgrade

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          developed, Jim McVittie
Lampoly    Problem    can be used, but process not tested yet

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *
                                              
Pquest     Shutdown    burnbox sump pump (should be ready tomorrow noon)
                                              
Prometrix  *    
                                              
P5000etch  Problem    can be used, but process not tested yet
                                              
RTAag      *   
                                              
RTAgaas    NOT installed        
                                            
STSetch    Shutdown    welding for exhaust line not completed yet



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