Etch Morning Report Jan 13,2003

Len Booth booth at
Mon Jan 13 09:07:41 PST 2003

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
AG4108     Problem     each user needs to verify Config values
                           values will change if power-cycled
AMTetcher  * 
Drytek1    *
Drytek2    Shutdown    maintenance & upgrade
                       characterization is in progress

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          developed, Jim McVittie

Lampoly    *

Lamsi      NOT installed
Matrix     *
MRC        *

P5000etch  Problem    can be used, but process not tested yet
Pquest     *

Prometrix  *    
RTAag      *   
RTAgaas    NOT installed        
STSetch    *

Wafersaw   *

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