Etch Morning Report Jan 24,2003

Len Booth booth at
Fri Jan 24 09:02:58 PST 2003

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
AG4108     Problem     each user needs to verify Config values
                           values will change if power-cycled
AMTetcher  * 
Drytek1    *
Drytek2    *

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          developed, Jim McVittie

Lampoly    *

Lamsi      NOT installed
Matrix     *
MRC        Shutdown    cooling lines failed

P5000etch  Shutdown    broken wafer
Pquest     *

Prometrix  *    
RTAag      *   
RTAgaas    NOT installed        
STSetch    *

Wafersaw   *

More information about the etch mailing list