From booth at snf.stanford.edu Tue Jul 1 09:06:54 2003 From: booth at snf.stanford.edu (Len Booth) Date: Tue, 01 Jul 2003 09:06:54 -0700 Subject: Etch Morning Report July 1, 2003 Message-ID: <3F01B19E.E07185F3@snf.stanford.edu> Etch Group - Morning Equipment Status Report 9:00 am Astrisk (*) = equipment up & ready for use AG4108 * each user needs to verify Config values values can change if power-cycled AMTetcher * Drytek1 * Drytek2 * Drytek4 * Gasonics Shutdown waiting for process recipe(s) to be approved, Jim McVittie Lampoly * Lamsi NOT installed Matrix * MRC Problem SF6 flow sometimes unstable & chamber pressure varies with some STSetch process operation P5000etch * Pquest * Prometrix * RTAag * RTAgaas NOT installed STSetch * Wafersaw * From booth at snf.stanford.edu Wed Jul 2 08:54:40 2003 From: booth at snf.stanford.edu (Len Booth) Date: Wed, 02 Jul 2003 08:54:40 -0700 Subject: Etch Morning Report July 2, 2003 Message-ID: <3F030040.41BE8D5F@snf.stanford.edu> Etch Group - Morning Equipment Status Report 9:00 am Astrisk (*) = equipment up & ready for use AG4108 * each user needs to verify Config values values can change if power-cycled AMTetcher * Drytek1 * Drytek2 * Drytek4 * Gasonics Shutdown waiting for process recipe(s) to be approved, Jim McVittie Lampoly * Lamsi NOT installed Matrix * MRC Problem SF6 flow sometimes unstable & chamber pressure varies with some STSetch process operation P5000etch * Pquest * Prometrix * RTAag * RTAgaas NOT installed STSetch * Wafersaw * From booth at snf.stanford.edu Thu Jul 3 08:37:25 2003 From: booth at snf.stanford.edu (Len Booth) Date: Thu, 03 Jul 2003 08:37:25 -0700 Subject: Etch Morning Report July 3, 2003 Message-ID: <3F044DB5.4166F987@snf.stanford.edu> Etch Group - Morning Equipment Status Report 9:00 am Astrisk (*) = equipment up & ready for use AG4108 * each user needs to verify Config values values can change if power-cycled AMTetcher * Drytek1 * Drytek2 * Drytek4 * Gasonics Shutdown waiting for process recipe(s) to be approved, Jim McVittie Lampoly * Lamsi NOT installed Matrix * MRC Problem SF6 flow sometimes unstable & chamber pressure varies with some STSetch process operation P5000etch Problem Ch C helium valve fault Pquest * Prometrix * RTAag * RTAgaas NOT installed STSetch * Wafersaw * From booth at snf.stanford.edu Mon Jul 7 08:46:41 2003 From: booth at snf.stanford.edu (Len Booth) Date: Mon, 07 Jul 2003 08:46:41 -0700 Subject: Etch Morning Report July 7, 2003 Message-ID: <3F0995E1.BD1F270D@snf.stanford.edu> Etch Group - Morning Equipment Status Report 9:00 am Astrisk (*) = equipment up & ready for use AG4108 * each user needs to verify Config values values can change if power-cycled AMTetcher * Drytek1 * Drytek2 * Drytek4 * Gasonics Shutdown waiting for process recipe(s) to be approved, Jim McVittie Lampoly * Lamsi NOT installed Matrix * MRC Problem SF6 flow sometimes unstable & chamber pressure varies with some STSetch process operation P5000etch Problem intermittant Ch C helium valve fault Pquest * Prometrix * RTAag * RTAgaas NOT installed STSetch * Wafersaw * From booth at snf.stanford.edu Tue Jul 8 09:09:16 2003 From: booth at snf.stanford.edu (Len Booth) Date: Tue, 08 Jul 2003 09:09:16 -0700 Subject: Etch Morning Report July 8, 2003 Message-ID: <3F0AECAC.B7201EF6@snf.stanford.edu> Etch Group - Morning Equipment Status Report 9:00 am Astrisk (*) = equipment up & ready for use AG4108 * each user needs to verify Config values values can change if power-cycled AMTetcher * Drytek1 * Drytek2 * Drytek4 * Gasonics Shutdown waiting for process recipe(s) to be approved, Jim McVittie Lampoly * Lamsi NOT installed Matrix * MRC * P5000etch Shutdown removed clamp from Ch C for Jim McVittie Pquest * Prometrix * RTAag * RTAgaas NOT installed STSetch Shutdown cleaning up broken wafer, will be available later this morning Wafersaw * From booth at snf.stanford.edu Wed Jul 9 08:44:01 2003 From: booth at snf.stanford.edu (Len Booth) Date: Wed, 09 Jul 2003 08:44:01 -0700 Subject: Etch Morning Report July 9, 2003 Message-ID: <3F0C3841.A4C9ECE3@snf.stanford.edu> Etch Group - Morning Equipment Status Report 9:00 am Astrisk (*) = equipment up & ready for use AG4108 * each user needs to verify Config values values can change if power-cycled AMTetcher * Drytek1 * Drytek2 * Drytek4 * Gasonics Shutdown waiting for process recipe(s) to be approved, Jim McVittie Lampoly * Lamsi NOT installed Matrix * MRC * P5000etch * Pquest * Prometrix * RTAag * RTAgaas NOT installed STSetch * Wafersaw * From booth at snf.stanford.edu Thu Jul 10 08:48:26 2003 From: booth at snf.stanford.edu (Len Booth) Date: Thu, 10 Jul 2003 08:48:26 -0700 Subject: Etch Morning Report July 10, 2003 Message-ID: <3F0D8ACA.BA266D57@snf.stanford.edu> Etch Group - Morning Equipment Status Report 9:00 am Astrisk (*) = equipment up & ready for use AG4108 * each user needs to verify Config values values can change if power-cycled AMTetcher * Drytek1 * Drytek2 * Drytek4 * Gasonics Shutdown waiting for process recipe(s) to be approved, Jim McVittie Lampoly * Lamsi NOT installed Matrix * MRC * P5000etch * Pquest * Prometrix * RTAag * RTAgaas NOT installed STSetch * Wafersaw * From booth at snf.stanford.edu Fri Jul 11 09:02:45 2003 From: booth at snf.stanford.edu (Len Booth) Date: Fri, 11 Jul 2003 09:02:45 -0700 Subject: Etch Morning Report July 11, 2003 Message-ID: <3F0EDFA5.1E2EA35B@snf.stanford.edu> Etch Group - Morning Equipment Status Report 9:00 am Astrisk (*) = equipment up & ready for use AG4108 * each user needs to verify Config values values can change if power-cycled AMTetcher * Drytek1 * Drytek2 * Drytek4 * Gasonics Shutdown waiting for process recipe(s) to be approved, Jim McVittie Lampoly Shutdown process gas exhaust leak at scrub duct Lamsi NOT installed Matrix * MRC * P5000etch * Pquest * Prometrix * RTAag * RTAgaas NOT installed STSetch * Wafersaw * From booth at snf.stanford.edu Mon Jul 14 08:46:40 2003 From: booth at snf.stanford.edu (Len Booth) Date: Mon, 14 Jul 2003 08:46:40 -0700 Subject: Etch Morning Report July 14, 2003 Message-ID: <3F12D05F.A256D91@snf.stanford.edu> Etch Group - Morning Equipment Status Report 9:00 am Astrisk (*) = equipment up & ready for use AG4108 * each user needs to verify Config values values can change if power-cycled AMTetcher * Drytek1 * Drytek2 * Drytek4 * Gasonics Shutdown waiting for process recipe(s) to be approved, Jim McVittie Lampoly Shutdown process gas exhaust leak at scrub duct Lamsi NOT installed Matrix * MRC * P5000etch * Pquest Shutdown broken wafer in etch chamber Prometrix * RTAag * RTAgaas NOT installed STSetch * Wafersaw * From booth at snf.stanford.edu Wed Jul 16 09:07:42 2003 From: booth at snf.stanford.edu (Len Booth) Date: Wed, 16 Jul 2003 09:07:42 -0700 Subject: Etch Morning Report July 16, 2003 Message-ID: <3F15784E.F873197C@snf.stanford.edu> Etch Group - Morning Equipment Status Report 9:00 am Astrisk (*) = equipment up & ready for use AG4108 * each user needs to verify Config values values can change if power-cycled AMTetcher * Drytek1 * Drytek2 Peoblem reported O2 process problem Drytek4 * Gasonics Shutdown waiting for process recipe(s) to be approved, Jim McVittie Lampoly Shutdown process gas exhaust leak at scrub duct Lamsi NOT installed Matrix * MRC * P5000etch * Pquest * Prometrix * RTAag * RTAgaas NOT installed STSetch * Wafersaw * From booth at snf.stanford.edu Thu Jul 17 08:44:00 2003 From: booth at snf.stanford.edu (Len Booth) Date: Thu, 17 Jul 2003 08:44:00 -0700 Subject: Etch Morning Report July 17, 2003 Message-ID: <3F16C440.62B30E19@snf.stanford.edu> Etch Group - Morning Equipment Status Report 9:00 am Astrisk (*) = equipment up & ready for use AG4108 * each user needs to verify Config values values can change if power-cycled AMTetcher * Drytek1 * Drytek2 * Drytek4 * Gasonics Shutdown waiting for process recipe(s) to be approved, Jim McVittie Lampoly * Lamsi NOT installed Matrix * MRC * P5000etch * Pquest * Prometrix * RTAag * RTAgaas NOT installed STSetch * Wafersaw * From booth at snf.stanford.edu Fri Jul 18 09:03:51 2003 From: booth at snf.stanford.edu (Len Booth) Date: Fri, 18 Jul 2003 09:03:51 -0700 Subject: Etch Morning Report July 18, 2003 Message-ID: <3F181A67.591C4409@snf.stanford.edu> Etch Group - Morning Equipment Status Report 9:00 am Astrisk (*) = equipment up & ready for use AG4108 * each user needs to verify Config values values can change if power-cycled AMTetcher * Drytek1 * Drytek2 * Drytek4 * Gasonics Shutdown waiting for process recipe(s) to be approved, Jim McVittie Lampoly * Lamsi NOT installed Matrix * MRC * P5000etch * Pquest * Prometrix * RTAag * RTAgaas NOT installed STSetch * Wafersaw * From booth at snf.stanford.edu Tue Jul 22 08:47:57 2003 From: booth at snf.stanford.edu (Len Booth) Date: Tue, 22 Jul 2003 08:47:57 -0700 Subject: Etch Morning Report July 22, 2003 Message-ID: <3F1D5CAD.EBA97D2B@snf.stanford.edu> Etch Group - Morning Equipment Status Report 9:00 am Astrisk (*) = equipment up & ready for use AG4108 * each user needs to verify Config values values can change if power-cycled AMTetcher * Drytek1 * Drytek2 * Drytek4 * Gasonics Shutdown waiting for process recipe(s) to be approved, Jim McVittie Lampoly * Lamsi NOT installed Matrix * MRC * P5000etch * Pquest * Prometrix * RTAag * RTAgaas NOT installed STSetch * Wafersaw * From booth at snf.stanford.edu Wed Jul 23 09:15:00 2003 From: booth at snf.stanford.edu (Len Booth) Date: Wed, 23 Jul 2003 09:15:00 -0700 Subject: Etch Morning Report July 23, 2003 Message-ID: <3F1EB484.79F77A1E@snf.stanford.edu> Etch Group - Morning Equipment Status Report 9:00 am Astrisk (*) = equipment up & ready for use AG4108 * each user needs to verify Config values values can change if power-cycled AMTetcher * Drytek1 * Drytek2 * Drytek4 * Gasonics Shutdown waiting for process recipe(s) to be approved, Jim McVittie Lampoly * Lamsi NOT installed Matrix * MRC * P5000etch * Pquest Shutdown Broken wafer in etch chamber Prometrix * RTAag * RTAgaas NOT installed STSetch * Wafersaw * From mw1200 at naver.com Thu Jul 24 19:21:15 2003 From: mw1200 at naver.com (곽미화) Date: Thu, 24 Jul 2003 20:21:15 -0600 Subject: (광고)사랑행ㅅ~~~~~~~`^^* Message-ID: An HTML attachment was scrubbed... URL: From booth at snf.stanford.edu Thu Jul 24 09:29:01 2003 From: booth at snf.stanford.edu (Len Booth) Date: Thu, 24 Jul 2003 09:29:01 -0700 Subject: Etch Morning Report July 24, 2003 Message-ID: <3F20094D.337A6327@snf.stanford.edu> Etch Group - Morning Equipment Status Report 9:00 am Astrisk (*) = equipment up & ready for use AG4108 * each user needs to verify Config values values can change if power-cycled AMTetcher * Drytek1 * Drytek2 * Drytek4 * Gasonics Shutdown waiting for process recipe(s) to be approved, Jim McVittie Lampoly * Lamsi NOT installed Matrix * MRC * P5000etch * Pquest * Prometrix * RTAag * RTAgaas NOT installed STSetch * Wafersaw * From booth at snf.stanford.edu Fri Jul 25 08:44:11 2003 From: booth at snf.stanford.edu (Len Booth) Date: Fri, 25 Jul 2003 08:44:11 -0700 Subject: Etch Morning Report July 25, 2003 Message-ID: <3F21504B.76352F32@snf.stanford.edu> Etch Group - Morning Equipment Status Report 9:00 am Astrisk (*) = equipment up & ready for use AG4108 * each user needs to verify Config values values can change if power-cycled AMTetcher * Drytek1 * Drytek2 * Drytek4 * Gasonics Shutdown waiting for process recipe(s) to be approved, Jim McVittie Lampoly * Lamsi NOT installed Matrix * MRC * P5000etch * Pquest * Prometrix * RTAag * RTAgaas NOT installed STSetch * Wafersaw * From booth at snf.stanford.edu Mon Jul 28 09:00:48 2003 From: booth at snf.stanford.edu (Len Booth) Date: Mon, 28 Jul 2003 09:00:48 -0700 Subject: Etch Morning Report July 28, 2003 Message-ID: <3F2548B0.D6E11280@snf.stanford.edu> Etch Group - Morning Equipment Status Report 9:00 am Astrisk (*) = equipment up & ready for use AG4108 * each user needs to verify Config values values can change if power-cycled Ammonia flow problem reported, may be recipe problem AMTetcher Shutdown arcing reported Drytek1 * Drytek2 * Drytek4 * Gasonics Shutdown waiting for process recipe(s) to be approved, Jim McVittie Lampoly * Lamsi NOT installed Matrix * MRC * P5000etch * Pquest * Maintenance scheduled Wed morning 7/30 Prometrix * RTAag * RTAgaas NOT installed STSetch * Wafersaw * From booth at snf.stanford.edu Tue Jul 29 08:40:14 2003 From: booth at snf.stanford.edu (Len Booth) Date: Tue, 29 Jul 2003 08:40:14 -0700 Subject: Etch Morning Report July 29, 2003 Message-ID: <3F26955E.A62F5DAA@snf.stanford.edu> Etch Group - Morning Equipment Status Report 9:00 am Astrisk (*) = equipment up & ready for use AG4108 * each user needs to verify Config values values can change if power-cycled Ammonia flow problem reported, NH3 purge-panel work later today Tues 7/29 AMTetcher * Drytek1 * Drytek2 * Drytek4 * Gasonics Shutdown waiting for process recipe(s) to be approved, Jim McVittie Lampoly * Lamsi NOT installed Matrix * MRC * P5000etch * Pquest * Maintenance scheduled Wed morning 7/30 Prometrix * RTAag * RTAgaas NOT installed STSetch * Wafersaw * From mw1200 at naver.com Thu Jul 31 11:04:27 2003 From: mw1200 at naver.com (곽미화) Date: Thu, 31 Jul 2003 12:04:27 -0600 Subject: (광고)"7월마지막 마무리 잘하세요~~~~~~`` Message-ID: An HTML attachment was scrubbed... URL: From booth at snf.stanford.edu Thu Jul 31 09:02:19 2003 From: booth at snf.stanford.edu (Len Booth) Date: Thu, 31 Jul 2003 09:02:19 -0700 Subject: Etch Morning Report July 31, 2003 Message-ID: <3F293D8B.18A3FE6A@snf.stanford.edu> Etch Group - Morning Equipment Status Report 9:00 am Astrisk (*) = equipment up & ready for use AG4108 * each user needs to verify Config values values can change if power-cycled Ammonia flow problem reported, Do NOT use NH3 for now. NH3 source repairs scheduled for Tuesday Aug 5th AMTetcher * Drytek1 * Drytek2 * Drytek4 * Gasonics Shutdown waiting for process recipe(s) to be approved, Jim McVittie Lampoly * Lamsi NOT installed Matrix * MRC * P5000etch * Pquest * Prometrix * RTAag * RTAgaas NOT installed STSetch * Wafersaw *