From booth at snf.stanford.edu  Mon Jun  2 09:00:22 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Mon, 02 Jun 2003 09:00:22 -0700
Subject: Etch Morning Report  June 2, 2003
Message-ID: <3EDB7496.23C892F7@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                 values can change if power-cycled
                                              
AMTetcher  *   hexode seal maintenance scheduled for this week

Drytek1    *         
                                              
Drytek2    *         

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    Shutdown   broken water cooling line

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        Shutdown   electrode chiller failed

           Problem   SF6 flow sometimes unstable &
                     chamber pressure varies with some 
                     STSetch process operation

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Mon Jun  9 08:54:53 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Mon, 09 Jun 2003 08:54:53 -0700
Subject: Etch Morning Report  June 9, 2003
Message-ID: <3EE4ADCD.ACE4ACBE@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                 values can change if power-cycled
                                              
AMTetcher  *   

Drytek1    *         
                                              
Drytek2    *         

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    Shutdown   pumps not working

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        Shutdown   electrode chiller failed

           Problem   SF6 flow sometimes unstable &
                     chamber pressure varies with some 
                     STSetch process operation

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   Shutdown   blades are jamming on spindle


From booth at snf.stanford.edu  Fri Jun 13 08:44:21 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Fri, 13 Jun 2003 08:44:21 -0700
Subject: Etch Morning Report  June 13, 2003
Message-ID: <3EE9F155.CE68854B@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                 values can change if power-cycled
                                              
AMTetcher  *   

Drytek1    *         
                                              
Drytek2    *         

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        Shutdown   electrode chiller failed

           Problem   SF6 flow sometimes unstable &
                     chamber pressure varies with some 
                     STSetch process operation

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Mon Jun 16 08:41:23 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Mon, 16 Jun 2003 08:41:23 -0700
Subject: Etch Morning Report  June 16, 2003
Message-ID: <3EEDE523.8956B83F@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                 values can change if power-cycled
                                              
AMTetcher  *   

Drytek1    *         
                                              
Drytek2    *         

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        Problem   SF6 flow sometimes unstable &
                     chamber pressure varies with some 
                     STSetch process operation

P5000etch  *
                                              
Pquest     Shutdown   broken wafer in etch chamber

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Tue Jun 17 08:33:32 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Tue, 17 Jun 2003 08:33:32 -0700
Subject: Etch Morning Report  June 17, 2003
Message-ID: <3EEF34CC.6EBED5E0@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                 values can change if power-cycled
                                              
AMTetcher  *   

Drytek1    *         
                                              
Drytek2    *         

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        Problem   SF6 flow sometimes unstable &
                     chamber pressure varies with some 
                     STSetch process operation

P5000etch  Problem   Chamber C (Si etch) is Shutdown, clamp replacement
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Wed Jun 18 08:49:34 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Wed, 18 Jun 2003 08:49:34 -0700
Subject: Etch Morning Report  June 18, 2003
Message-ID: <3EF08A0E.5DC599DD@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                 values can change if power-cycled
                                              
AMTetcher  *   

Drytek1    *         
                                              
Drytek2    *         

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        Problem   SF6 flow sometimes unstable &
                     chamber pressure varies with some 
                     STSetch process operation

P5000etch  Problem   Chamber C (Si etch) wafers stick to clamp
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Thu Jun 19 08:42:20 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Thu, 19 Jun 2003 08:42:20 -0700
Subject: Etch Morning Report  June 19, 2003
Message-ID: <3EF1D9DC.EE137CF3@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                 values can change if power-cycled
                                              
AMTetcher  *   

Drytek1    *         
                                              
Drytek2    *         

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        Problem   SF6 flow sometimes unstable &
                     chamber pressure varies with some 
                     STSetch process operation

P5000etch  Problem   Chamber C (Si etch) wafers stick to clamp
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Fri Jun 20 08:27:22 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Fri, 20 Jun 2003 08:27:22 -0700
Subject: Etch Morning Report  June 20,2003
Message-ID: <3EF327DA.A173B1CF@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                 values can change if power-cycled
                                              
AMTetcher  *   

Drytek1    *         
                                              
Drytek2    *         

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        Problem   SF6 flow sometimes unstable &
                     chamber pressure varies with some 
                     STSetch process operation

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Mon Jun 23 08:33:17 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Mon, 23 Jun 2003 08:33:17 -0700
Subject: Morning Etch Report  June 23, 2003
Message-ID: <3EF71DBD.CA739D8A@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                 values can change if power-cycled
                                              
AMTetcher  *   

Drytek1    *         
                                              
Drytek2    *         

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     Shutdown   pumping fault
                                              
MRC        Problem   SF6 flow sometimes unstable &
                     chamber pressure varies with some 
                     STSetch process operation

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Tue Jun 24 08:41:41 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Tue, 24 Jun 2003 08:41:41 -0700
Subject: Etch Morning Report  June 24, 2003
Message-ID: <3EF87135.D4C01982@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                 values can change if power-cycled
                                              
AMTetcher  *   

Drytek1    *         
                                              
Drytek2    *         

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     Shutdown   pumping fault,     parts should arrive today
                                              
MRC        Problem   SF6 flow sometimes unstable &
                     chamber pressure varies with some 
                     STSetch process operation

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *  some maintenance time today & tomorrow

Wafersaw   *


From booth at snf.stanford.edu  Wed Jun 25 09:13:54 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Wed, 25 Jun 2003 09:13:54 -0700
Subject: Etch Morning Report  June 25, 2003
Message-ID: <3EF9CA42.2B62D56F@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                 values can change if power-cycled
                                              
AMTetcher  *   

Drytek1    *         
                                              
Drytek2    *         

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        Problem   SF6 flow sometimes unstable &
                     chamber pressure varies with some 
                     STSetch process operation

P5000etch  *
                                              
Pquest     Shutdown   Monitor died

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *  some maintenance time today

Wafersaw   *


From booth at snf.stanford.edu  Thu Jun 26 08:24:51 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Thu, 26 Jun 2003 08:24:51 -0700
Subject: Etch Morning Report  June 26, 2003
Message-ID: <3EFB1043.2CF9D44@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                 values can change if power-cycled
                                              
AMTetcher  *   

Drytek1    *         
                                              
Drytek2    *         

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        Problem   SF6 flow sometimes unstable &
                     chamber pressure varies with some 
                     STSetch process operation

P5000etch  *
                                              
Pquest     Shutdown   Monitor died, installing different monitor

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Fri Jun 27 08:52:45 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Fri, 27 Jun 2003 08:52:45 -0700
Subject: Etch Morning Report  June 27, 2003
Message-ID: <3EFC684D.9149422E@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                 values can change if power-cycled
                                              
AMTetcher  *   

Drytek1    *         
                                              
Drytek2    *         

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        Problem   SF6 flow sometimes unstable &
                     chamber pressure varies with some 
                     STSetch process operation

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Mon Jun 30 09:04:53 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Mon, 30 Jun 2003 09:04:53 -0700
Subject: Etch Morning Report  June 30, 2003
Message-ID: <3F005FA5.E29E032@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                 values can change if power-cycled
                                              
AMTetcher  *   

Drytek1    *         
                                              
Drytek2    *         

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        Problem   SF6 flow sometimes unstable &
                     chamber pressure varies with some 
                     STSetch process operation

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *