From booth at snf.stanford.edu  Mon Mar  3 08:36:35 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Mon, 03 Mar 2003 08:36:35 -0800
Subject: Etch Morning Report  Mar 3, 2003
Message-ID: <3E638493.23251F9C@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     Problem     each user needs to verify Config values
                           values will change if power-cycled
                                              
AMTetcher  * 
    
Drytek1    *
                                              
Drytek2    *

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          developed, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *   
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Tue Mar  4 08:45:37 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Tue, 04 Mar 2003 08:45:37 -0800
Subject: Etch Morning Report  Mar 4, 2003
Message-ID: <3E64D831.43A11E62@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     Problem     each user needs to verify Config values
                           values will change if power-cycled
                                              
AMTetcher  * 
    
Drytek1    *
                                              
Drytek2    *

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          developed, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *   
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Fri Mar  7 09:09:38 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Fri, 07 Mar 2003 09:09:38 -0800
Subject: Etch Morning Report  Mar 7, 2003
Message-ID: <3E68D252.E2F60B89@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     Problem     each user needs to verify Config values
                           values will change if power-cycled
                                              
AMTetcher  * 
    
Drytek1    *
                                              
Drytek2    *

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          developed, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *   
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Mon Mar 17 13:54:20 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Mon, 17 Mar 2003 13:54:20 -0800
Subject: Etch Morning Report  Mar 17, 2003
Message-ID: <3E76440C.7FF854B3@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     Problem     each user needs to verify Config values
                           values will change if power-cycled
                                              
AMTetcher  * 
    
Drytek1    *
                                              
Drytek2    *

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          developed, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *   
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Tue Mar 18 08:54:16 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Tue, 18 Mar 2003 08:54:16 -0800
Subject: Etch Morning Report  Mar 18, 2003
Message-ID: <3E774F38.E159EFDF@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     Problem     each user needs to verify Config values
                           values will change if power-cycled
                                              
AMTetcher  * 
    
Drytek1    *
                                              
Drytek2    *

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          developed, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *   
                                              
RTAgaas    NOT installed        
                                            
STSetch    *    Cathode temp will be set to 12 deg C for two days

Wafersaw   *


From booth at snf.stanford.edu  Thu Mar 20 08:51:30 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Thu, 20 Mar 2003 08:51:30 -0800
Subject: Etch Morning Report  Mar 20, 2003
Message-ID: <3E79F192.29949C87@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     Problem     each user needs to verify Config values
                           values will change if power-cycled
                                              
AMTetcher  * 
    
Drytek1    *
                                              
Drytek2    *

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          developed, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *   
                                              
RTAgaas    NOT installed        
                                            
STSetch    *    Cathode temp has been set back to 20 deg C

Wafersaw   *


From booth at snf.stanford.edu  Fri Mar 21 09:09:06 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Fri, 21 Mar 2003 09:09:06 -0800
Subject: Etch Morning Report  Mar 21, 2003
Message-ID: <3E7B4732.4D24334E@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     Problem     each user needs to verify Config values
                           values will change if power-cycled
                                              
AMTetcher  * 
    
Drytek1    *
                                              
Drytek2    *

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          developed, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *   
                                              
RTAgaas    NOT installed        
                                            
STSetch    *    

Wafersaw   *


From booth at snf.stanford.edu  Mon Mar 24 08:59:22 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Mon, 24 Mar 2003 08:59:22 -0800
Subject: Etch Morning Report  Mar 24, 2003
Message-ID: <3E7F396A.C91E0F58@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     Problem     each user needs to verify Config values
                           values will change if power-cycled
                                              
AMTetcher  * 
    
Drytek1    *
                                              
Drytek2    *

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          developed, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     Shutdown    will try to have it running this afternoon
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *   
                                              
RTAgaas    NOT installed        
                                            
STSetch    *    

Wafersaw   *


From booth at snf.stanford.edu  Tue Mar 25 08:57:46 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Tue, 25 Mar 2003 08:57:46 -0800
Subject: Etch Morning Report  Mar 25, 2003
Message-ID: <3E808A8A.3B0EA2FB@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     Problem     each user needs to verify Config values
                           values will change if power-cycled
                                              
AMTetcher  * 
    
Drytek1    *
                                              
Drytek2    *

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          developed, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *   
                                              
RTAgaas    NOT installed        
                                            
STSetch    *    

Wafersaw   *


From booth at snf.stanford.edu  Wed Mar 26 08:36:55 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Wed, 26 Mar 2003 08:36:55 -0800
Subject: Etch Morning Report  Mar 26, 2003
Message-ID: <3E81D727.E0C2105C@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                           values can change if power-cycled
                                              
AMTetcher  * 
    
Drytek1    *
                                              
Drytek2    *

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          developed, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *   
                                              
RTAgaas    NOT installed        
                                            
STSetch    *    

Wafersaw   *


From booth at snf.stanford.edu  Thu Mar 27 08:33:14 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Thu, 27 Mar 2003 08:33:14 -0800
Subject: Etch Morning Report  Mar 27, 2003
Message-ID: <3E8327CA.A1B3EF5@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                           values can change if power-cycled
                                              
AMTetcher  * 
    
Drytek1    *
                                              
Drytek2    *

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          developed, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     Shutdown    preventative maintenance today
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *   
                                              
RTAgaas    NOT installed        
                                            
STSetch    *    

Wafersaw   *


From booth at snf.stanford.edu  Fri Mar 28 08:47:46 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Fri, 28 Mar 2003 08:47:46 -0800
Subject: Etch Morning Report  Mar 28, 2003
Message-ID: <3E847CB2.2AFEB4CC@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                           values can change if power-cycled
                                              
AMTetcher  * 
    
Drytek1    *
                                              
Drytek2    *

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          developed, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     Shutdown    preventative maintenance today continues
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *   
                                              
RTAgaas    NOT installed        
                                            
STSetch    *    

Wafersaw   *


From booth at snf.stanford.edu  Mon Mar 31 08:31:17 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Mon, 31 Mar 2003 08:31:17 -0800
Subject: Etch Morning Report  Mar 31, 2003
Message-ID: <3E886D55.5969593@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                           values can change if power-cycled
                                              
AMTetcher  * 
    
Drytek1    *
                                              
Drytek2    *

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          developed, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     Shutdown    
                                              
MRC        *

P5000etch  Problem    Chamber C  RF fault
                                              
Pquest     Shutdown    broken wafer

Prometrix  *    
                                               
RTAag      *   
                                              
RTAgaas    NOT installed        
                                            
STSetch    *    

Wafersaw   *