From booth at snf.stanford.edu Thu May 1 08:42:29 2003 From: booth at snf.stanford.edu (Len Booth) Date: Thu, 01 May 2003 08:42:29 -0700 Subject: Etch Morning Report May 1, 2003 Message-ID: <3EB14065.2A1F6977@snf.stanford.edu> Etch Group - Morning Equipment Status Report 9:00 am Astrisk (*) = equipment up & ready for use AG4108 * each user needs to verify Config values values can change if power-cycled AMTetcher * Drytek1 * Drytek2 * Drytek4 * Gasonics Shutdown waiting for process recipe(s) to be approved, Jim McVittie Lampoly * Lamsi NOT installed Matrix * MRC Problem SF6 flow sometimes unstable & chamber pressure varies with some STSetch process operation P5000etch * Pquest * Prometrix * RTAag * RTAgaas NOT installed STSetch * Wafersaw * From booth at snf.stanford.edu Mon May 5 08:27:07 2003 From: booth at snf.stanford.edu (Len Booth) Date: Mon, 05 May 2003 08:27:07 -0700 Subject: Etch Morning Report May 5, 2003 Message-ID: <3EB682CB.BAFB670B@snf.stanford.edu> Etch Group - Morning Equipment Status Report 9:00 am Astrisk (*) = equipment up & ready for use AG4108 * each user needs to verify Config values values can change if power-cycled AMTetcher * Drytek1 * Drytek2 * Drytek4 * Gasonics Shutdown waiting for process recipe(s) to be approved, Jim McVittie Lampoly * Lamsi NOT installed Matrix * MRC Problem SF6 flow sometimes unstable & chamber pressure varies with some STSetch process operation P5000etch * Pquest * Prometrix * RTAag * RTAgaas NOT installed STSetch * Wafersaw * From booth at snf.stanford.edu Tue May 6 08:54:22 2003 From: booth at snf.stanford.edu (Len Booth) Date: Tue, 06 May 2003 08:54:22 -0700 Subject: Etch Morning Report May 6, 2003 Message-ID: <3EB7DAAE.62238548@snf.stanford.edu> Etch Group - Morning Equipment Status Report 9:00 am Astrisk (*) = equipment up & ready for use AG4108 * each user needs to verify Config values values can change if power-cycled AMTetcher Shutdown Arcing on trays & trays are loos Drytek1 Shutdown CF4 repair in progress Drytek2 * Drytek4 Problem Standby light is not working Gasonics Shutdown waiting for process recipe(s) to be approved, Jim McVittie Lampoly * Lamsi NOT installed Matrix * MRC Problem SF6 flow sometimes unstable & chamber pressure varies with some STSetch process operation P5000etch Problem Ch A backsid Helium flow faults Pquest * Prometrix * RTAag * RTAgaas NOT installed STSetch * Wafersaw * From booth at snf.stanford.edu Wed May 7 08:55:27 2003 From: booth at snf.stanford.edu (Len Booth) Date: Wed, 07 May 2003 08:55:27 -0700 Subject: Etch Morning Report May 7, 2003 Message-ID: <3EB92C6F.97B93B38@snf.stanford.edu> Etch Group - Morning Equipment Status Report 9:00 am Astrisk (*) = equipment up & ready for use AG4108 * each user needs to verify Config values values can change if power-cycled AMTetcher * Drytek1 * Drytek2 * Drytek4 * Gasonics Shutdown waiting for process recipe(s) to be approved, Jim McVittie Lampoly * Lamsi NOT installed Matrix * MRC Problem SF6 flow sometimes unstable & chamber pressure varies with some STSetch process operation P5000etch Problem Ch A backside Helium flow faults Pquest * Prometrix * RTAag * RTAgaas NOT installed STSetch * Wafersaw * From booth at snf.stanford.edu Thu May 8 08:47:23 2003 From: booth at snf.stanford.edu (Len Booth) Date: Thu, 08 May 2003 08:47:23 -0700 Subject: Etch Morning Report May 8,2003 Message-ID: <3EBA7C0B.14C2F783@snf.stanford.edu> Etch Group - Morning Equipment Status Report 9:00 am Astrisk (*) = equipment up & ready for use AG4108 * each user needs to verify Config values values can change if power-cycled AMTetcher * Drytek1 * Drytek2 * Drytek4 * Gasonics Shutdown waiting for process recipe(s) to be approved, Jim McVittie Lampoly * Lamsi NOT installed Matrix * MRC Problem SF6 flow sometimes unstable & chamber pressure varies with some STSetch process operation P5000etch * Pquest * Prometrix * RTAag * RTAgaas NOT installed STSetch * Wafersaw * From booth at snf.stanford.edu Mon May 12 08:46:51 2003 From: booth at snf.stanford.edu (Len Booth) Date: Mon, 12 May 2003 08:46:51 -0700 Subject: Etch Morning Report May 12, 2003 Message-ID: <3EBFC1EB.DC867FEB@snf.stanford.edu> Etch Group - Morning Equipment Status Report 9:00 am Astrisk (*) = equipment up & ready for use AG4108 * each user needs to verify Config values values can change if power-cycled AMTetcher Shutdown low DC bias reported Drytek1 * Drytek2 * Drytek4 * Gasonics Shutdown waiting for process recipe(s) to be approved, Jim McVittie Lampoly * Lamsi NOT installed Matrix * MRC Problem SF6 flow sometimes unstable & chamber pressure varies with some STSetch process operation P5000etch * Pquest * Prometrix * RTAag * RTAgaas NOT installed STSetch * Wafersaw * From booth at snf.stanford.edu Tue May 13 08:42:30 2003 From: booth at snf.stanford.edu (Len Booth) Date: Tue, 13 May 2003 08:42:30 -0700 Subject: Etch Morning Report May 13, 2003 Message-ID: <3EC11266.C0398E7A@snf.stanford.edu> Etch Group - Morning Equipment Status Report 9:00 am Astrisk (*) = equipment up & ready for use AG4108 * each user needs to verify Config values values can change if power-cycled AMTetcher * Drytek1 * Drytek2 * Drytek4 * Gasonics Shutdown waiting for process recipe(s) to be approved, Jim McVittie Lampoly * Lamsi NOT installed Matrix * MRC Problem SF6 flow sometimes unstable & chamber pressure varies with some STSetch process operation P5000etch * Pquest * Prometrix * RTAag * RTAgaas NOT installed STSetch * Wafersaw * From booth at snf.stanford.edu Wed May 14 09:05:50 2003 From: booth at snf.stanford.edu (Len Booth) Date: Wed, 14 May 2003 09:05:50 -0700 Subject: Etch Morning Report May 14, 2003 Message-ID: <3EC2695E.556ED9F6@snf.stanford.edu> Etch Group - Morning Equipment Status Report 9:00 am Astrisk (*) = equipment up & ready for use AG4108 * each user needs to verify Config values values can change if power-cycled AMTetcher * Drytek1 * Drytek2 * Drytek4 * Gasonics Shutdown waiting for process recipe(s) to be approved, Jim McVittie Lampoly Shutdown crud appeared on test wafers Lamsi NOT installed Matrix * MRC Problem SF6 flow sometimes unstable & chamber pressure varies with some STSetch process operation P5000etch * Pquest Problem LoadLock wafer sensor getting flaky Prometrix * RTAag * RTAgaas NOT installed STSetch * Wafersaw * From booth at snf.stanford.edu Thu May 15 09:21:01 2003 From: booth at snf.stanford.edu (Len Booth) Date: Thu, 15 May 2003 09:21:01 -0700 Subject: Etch Morning Report May 15, 2003 Message-ID: <3EC3BE6D.A59A510B@snf.stanford.edu> Etch Group - Morning Equipment Status Report 9:00 am Astrisk (*) = equipment up & ready for use AG4108 * each user needs to verify Config values values can change if power-cycled AMTetcher * Drytek1 * Drytek2 * Drytek4 * Gasonics Shutdown waiting for process recipe(s) to be approved, Jim McVittie Lampoly Shutdown system faulted, wafers stuck in system Lamsi NOT installed Matrix * MRC Problem SF6 flow sometimes unstable & chamber pressure varies with some STSetch process operation P5000etch * Pquest * Prometrix * RTAag * RTAgaas NOT installed STSetch * Wafersaw * From booth at snf.stanford.edu Fri May 16 08:43:44 2003 From: booth at snf.stanford.edu (Len Booth) Date: Fri, 16 May 2003 08:43:44 -0700 Subject: Etch Morning Report May 16, 2003 Message-ID: <3EC50730.5F1D9E8B@snf.stanford.edu> Etch Group - Morning Equipment Status Report 9:00 am Astrisk (*) = equipment up & ready for use AG4108 * each user needs to verify Config values values can change if power-cycled AMTetcher * Drytek1 * Drytek2 * Drytek4 * Gasonics Shutdown waiting for process recipe(s) to be approved, Jim McVittie Lampoly * Lamsi NOT installed Matrix * MRC Problem SF6 flow sometimes unstable & chamber pressure varies with some STSetch process operation P5000etch * Pquest * Prometrix * RTAag * RTAgaas NOT installed STSetch * Wafersaw * From booth at snf.stanford.edu Mon May 19 08:35:15 2003 From: booth at snf.stanford.edu (Len Booth) Date: Mon, 19 May 2003 08:35:15 -0700 Subject: Etch Morning Report May 19, 2003 Message-ID: <3EC8F9B3.B7A0F159@snf.stanford.edu> Etch Group - Morning Equipment Status Report 9:00 am Astrisk (*) = equipment up & ready for use AG4108 * each user needs to verify Config values values can change if power-cycled AMTetcher Shutdown Arcing on trays Drytek1 * Drytek2 * Friday change from F-115 to F-22 Drytek4 Shutdown Pumps are turned off Gasonics Shutdown waiting for process recipe(s) to be approved, Jim McVittie Lampoly * Lamsi NOT installed Matrix * MRC Problem SF6 flow sometimes unstable & chamber pressure varies with some STSetch process operation P5000etch * Pquest * Prometrix * RTAag * RTAgaas NOT installed STSetch * Wafersaw * From booth at snf.stanford.edu Tue May 20 09:32:38 2003 From: booth at snf.stanford.edu (Len Booth) Date: Tue, 20 May 2003 09:32:38 -0700 Subject: Etch Morning Report May 20, 2003 Message-ID: <3ECA58A6.90F16B41@snf.stanford.edu> Etch Group - Morning Equipment Status Report 9:00 am Astrisk (*) = equipment up & ready for use AG4108 * each user needs to verify Config values values can change if power-cycled AMTetcher * Drytek1 * Drytek2 * Friday change from F-115 to F-22 Drytek4 * Gasonics Shutdown waiting for process recipe(s) to be approved, Jim McVittie Lampoly * Lamsi NOT installed Matrix * MRC Problem SF6 flow sometimes unstable & chamber pressure varies with some STSetch process operation P5000etch * Pquest * Prometrix * RTAag * RTAgaas NOT installed STSetch * Wafersaw * From booth at snf.stanford.edu Wed May 21 09:18:18 2003 From: booth at snf.stanford.edu (Len Booth) Date: Wed, 21 May 2003 09:18:18 -0700 Subject: Etch Morning Report May 21, 2003 Message-ID: <3ECBA6CA.9EF1606B@snf.stanford.edu> Etch Group - Morning Equipment Status Report 9:00 am Astrisk (*) = equipment up & ready for use AG4108 * each user needs to verify Config values values can change if power-cycled AMTetcher * Drytek1 * Drytek2 * Thursday change from F-115 to F-22 Drytek4 * Gasonics Shutdown waiting for process recipe(s) to be approved, Jim McVittie Lampoly * Lamsi NOT installed Matrix * MRC Problem SF6 flow sometimes unstable & chamber pressure varies with some STSetch process operation P5000etch * Pquest * Prometrix * RTAag * RTAgaas NOT installed STSetch * Wafersaw * From booth at snf.stanford.edu Thu May 22 08:57:47 2003 From: booth at snf.stanford.edu (Len Booth) Date: Thu, 22 May 2003 08:57:47 -0700 Subject: Etch Morning Report may 22, 2003 Message-ID: <3ECCF37B.CC7167B7@snf.stanford.edu> Etch Group - Morning Equipment Status Report 9:00 am Astrisk (*) = equipment up & ready for use AG4108 * each user needs to verify Config values values can change if power-cycled AMTetcher * Drytek1 * Thursday change from F-115 to F-22 Drytek2 * Thursday change from F-115 to F-22 Drytek4 * Gasonics Shutdown waiting for process recipe(s) to be approved, Jim McVittie Lampoly * Lamsi NOT installed Matrix * MRC Problem SF6 flow sometimes unstable & chamber pressure varies with some STSetch process operation Thursday change from F-115 to F-22 P5000etch Problem Ch C maintenance in progress Pquest * Prometrix * RTAag * RTAgaas NOT installed STSetch * Wafersaw * From booth at snf.stanford.edu Fri May 23 08:49:53 2003 From: booth at snf.stanford.edu (Len Booth) Date: Fri, 23 May 2003 08:49:53 -0700 Subject: Etch Morning Report Mqy 23, 2003 Message-ID: <3ECE4321.840D7E5F@snf.stanford.edu> Etch Group - Morning Equipment Status Report 9:00 am Astrisk (*) = equipment up & ready for use AG4108 * each user needs to verify Config values values can change if power-cycled AMTetcher * Drytek1 * Thursday change from F-115 to F-22 Drytek2 * Thursday change from F-115 to F-22 Drytek4 * Gasonics Shutdown waiting for process recipe(s) to be approved, Jim McVittie Lampoly * Lamsi NOT installed Matrix * MRC Problem SF6 flow sometimes unstable & chamber pressure varies with some STSetch process operation Thursday change from F-115 to F-22 P5000etch * Pquest Problem Tom Lee left unknown contaminants in chamber Prometrix * RTAag * RTAgaas NOT installed STSetch * Wafersaw * From booth at snf.stanford.edu Tue May 27 09:29:02 2003 From: booth at snf.stanford.edu (Len Booth) Date: Tue, 27 May 2003 09:29:02 -0700 Subject: Etch Morning Report May 27, 2003 Message-ID: <3ED3924E.B72272EC@snf.stanford.edu> Etch Group - Morning Equipment Status Report 9:00 am Astrisk (*) = equipment up & ready for use AG4108 * each user needs to verify Config values values can change if power-cycled AMTetcher Shutdown Belljar lift broken Drytek1 * Drytek2 * Drytek4 * Gasonics Shutdown waiting for process recipe(s) to be approved, Jim McVittie Lampoly Shutdown System lockup & hard disk not working Lamsi NOT installed Matrix * MRC Problem SF6 flow sometimes unstable & chamber pressure varies with some STSetch process operation Thursday change from F-115 to F-22 P5000etch * Pquest Problem Tom Lee left unknown contaminants in chamber Prometrix * RTAag * RTAgaas NOT installed STSetch Shutdown wafer broken in etch chamber Wafersaw * From booth at snf.stanford.edu Wed May 28 09:20:01 2003 From: booth at snf.stanford.edu (Len Booth) Date: Wed, 28 May 2003 09:20:01 -0700 Subject: Etch Morning Report May 28,2003 Message-ID: <3ED4E1B1.F7E24FE6@snf.stanford.edu> Etch Group - Morning Equipment Status Report 9:00 am Astrisk (*) = equipment up & ready for use AG4108 * each user needs to verify Config values values can change if power-cycled AMTetcher * hexode seal maintenance rescheduled for next week Drytek1 * Drytek2 * Drytek4 * Gasonics Shutdown waiting for process recipe(s) to be approved, Jim McVittie Lampoly Shutdown System lockup & hard disk not working Lamsi NOT installed Matrix * MRC Problem SF6 flow sometimes unstable & chamber pressure varies with some STSetch process operation P5000etch * Pquest * Prometrix * RTAag * RTAgaas NOT installed STSetch * Wafersaw * From booth at snf.stanford.edu Thu May 29 09:12:53 2003 From: booth at snf.stanford.edu (Len Booth) Date: Thu, 29 May 2003 09:12:53 -0700 Subject: Etch Morning Report May 29, 2003 Message-ID: <3ED63185.900FED1B@snf.stanford.edu> Etch Group - Morning Equipment Status Report 9:00 am Astrisk (*) = equipment up & ready for use AG4108 * each user needs to verify Config values values can change if power-cycled AMTetcher * hexode seal maintenance rescheduled for next week Drytek1 * Drytek2 * Drytek4 * Gasonics Shutdown waiting for process recipe(s) to be approved, Jim McVittie Lampoly * Lamsi NOT installed Matrix * MRC Problem SF6 flow sometimes unstable & chamber pressure varies with some STSetch process operation P5000etch * Pquest * Prometrix * RTAag * RTAgaas NOT installed STSetch * Wafersaw * From booth at snf.stanford.edu Fri May 30 09:15:10 2003 From: booth at snf.stanford.edu (Len Booth) Date: Fri, 30 May 2003 09:15:10 -0700 Subject: Etch Morning Report May 30, 2003 Message-ID: <3ED7838E.696A9C3@snf.stanford.edu> Etch Group - Morning Equipment Status Report 9:00 am Astrisk (*) = equipment up & ready for use AG4108 Shutdown water flow fault each user needs to verify Config values values can change if power-cycled AMTetcher * hexode seal maintenance rescheduled for next week Drytek1 * Drytek2 * Drytek4 * Gasonics Shutdown waiting for process recipe(s) to be approved, Jim McVittie Lampoly * Lamsi NOT installed Matrix * MRC Problem SF6 flow sometimes unstable & chamber pressure varies with some STSetch process operation P5000etch * Pquest * Prometrix * RTAag * RTAgaas NOT installed STSetch * Wafersaw *