Etch Morning Report May 6, 2003

Len Booth booth at
Tue May 6 08:54:22 PDT 2003

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
AG4108     *     each user needs to verify Config values
                 values can change if power-cycled
AMTetcher  Shutdown   Arcing on trays & trays are loos

Drytek1    Shutdown   CF4 repair in progress
Drytek2    *

Drytek4    Problem   Standby light is not working

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
Matrix     *
MRC        Problem   SF6 flow sometimes unstable & chamber pressure 
                     varies with some STSetch process operation

P5000etch  Problem   Ch A backsid Helium flow faults
Pquest     *

Prometrix  *    
RTAag      *
RTAgaas    NOT installed        
STSetch    *

Wafersaw   *

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