Etch Morning Report May 8,2003

Len Booth booth at snf.stanford.edu
Thu May 8 08:47:23 PDT 2003


Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                 values can change if power-cycled
                                              
AMTetcher  *

Drytek1    *
                                              
Drytek2    *

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        Problem   SF6 flow sometimes unstable & chamber pressure 
                     varies with some STSetch process operation

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *



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