Etch Morning Report May 14, 2003

[Len Booth]

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                 values can change if power-cycled
                                              
AMTetcher  *

Drytek1    *
                                              
Drytek2    *

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    Shutdown   crud appeared on test wafers

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        Problem   SF6 flow sometimes unstable &
chamber                                                                                     
pressure varies with some STSetch 
                     process operation

P5000etch  *
                                              
Pquest     Problem   LoadLock wafer sensor getting flaky

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *