Etch Morning Report May 14, 2003

Len Booth booth at
Wed May 14 09:05:50 PDT 2003

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
AG4108     *     each user needs to verify Config values
                 values can change if power-cycled
AMTetcher  *

Drytek1    *
Drytek2    *

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    Shutdown   crud appeared on test wafers

Lamsi      NOT installed
Matrix     *
MRC        Problem   SF6 flow sometimes unstable &
pressure varies with some STSetch 
                     process operation

P5000etch  *
Pquest     Problem   LoadLock wafer sensor getting flaky

Prometrix  *    
RTAag      *
RTAgaas    NOT installed        
STSetch    *

Wafersaw   *

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