Etch Morning Report May 27, 2003

Len Booth booth at snf.stanford.edu
Tue May 27 09:29:02 PDT 2003


Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                 values can change if power-cycled
                                              
AMTetcher  Shutdown   Belljar lift broken

Drytek1    *         
                                              
Drytek2    *         

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    Shutdown   System lockup & hard disk not working

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        Problem   SF6 flow sometimes unstable &
                     chamber pressure varies with some 
                     STSetch process operation

                     Thursday change from F-115 to F-22

P5000etch  *
                                              
Pquest     Problem   Tom Lee left unknown contaminants in chamber

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    Shutdown   wafer broken in etch chamber

Wafersaw   *



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