Etch Morning Report May 27, 2003

Len Booth booth at
Tue May 27 09:29:02 PDT 2003

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
AG4108     *     each user needs to verify Config values
                 values can change if power-cycled
AMTetcher  Shutdown   Belljar lift broken

Drytek1    *         
Drytek2    *         

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    Shutdown   System lockup & hard disk not working

Lamsi      NOT installed
Matrix     *
MRC        Problem   SF6 flow sometimes unstable &
                     chamber pressure varies with some 
                     STSetch process operation

                     Thursday change from F-115 to F-22

P5000etch  *
Pquest     Problem   Tom Lee left unknown contaminants in chamber

Prometrix  *    
RTAag      *
RTAgaas    NOT installed        
STSetch    Shutdown   wafer broken in etch chamber

Wafersaw   *

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