From booth at snf.stanford.edu  Wed Oct  1 09:28:40 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Wed, 01 Oct 2003 09:28:40 -0700
Subject: Etch Morning Report  Oct 1, 2003
Message-ID: <3F7B00B8.7C36EB7@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *    each user needs to verify Config values
                 values can change if power-cycled


AMTetcher  *

Drytek1    *         
                                              
Drytek2    *   

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Thu Oct  2 09:06:04 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Thu, 02 Oct 2003 09:06:04 -0700
Subject: Etch Morning Report  Oct 2, 2003
Message-ID: <3F7C4CEC.2B45E07B@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *    each user needs to verify Config values
                 values can change if power-cycled


AMTetcher  *

Drytek1    *         
                                              
Drytek2    *   

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Tue Oct  7 08:23:24 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Tue, 07 Oct 2003 08:23:24 -0700
Subject: Etch Morning Report  Oct 7,2003
Message-ID: <3F82DA6C.EF34981C@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *    each user needs to verify Config values
                 values can change if power-cycled

           Shutdown   Oven cooling water chiller has failed

AMTetcher  *

Drytek1    *         
                                              
Drytek2    *   

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From mw1200 at naver.com  Wed Oct  8 09:42:06 2003
From: mw1200 at naver.com (°û¹ÌÈ­)
Date: Wed, 08 Oct 2003 10:42:06 -0600
Subject: (±¤°í)º¸¼¼¿ä.......¾Èº¸¸é ÈÄȸÇÒ²®´Ï´Ù   
Message-ID: <mailman.3.1356281591.3700.etch@snf.stanford.edu>

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From booth at snf.stanford.edu  Wed Oct  8 08:29:29 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Wed, 08 Oct 2003 08:29:29 -0700
Subject: Etch Morning Report  Oct 8, 2003
Message-ID: <3F842D59.216D813@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *    each user needs to verify Config values
                 values can change if power-cycled

           Shutdown   Oven cooling water chiller has failed

AMTetcher  *

Drytek1    *         
                                              
Drytek2    *   

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Thu Oct  9 08:51:15 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Thu, 09 Oct 2003 08:51:15 -0700
Subject: Etch Morning Report  Oct 09, 2003
Message-ID: <3F8583F3.49355F6@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *    each user needs to verify Config values
                 values can change if power-cycled

           Shutdown   Oven cooling water chiller has failed

AMTetcher  *

Drytek1    *         
                                              
Drytek2    *   

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Fri Oct 10 08:51:23 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Fri, 10 Oct 2003 08:51:23 -0700
Subject: Etch Morning Report  Oct 10, 2003
Message-ID: <3F86D57B.48FB1474@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *    each user needs to verify Config values
                 values can change if power-cycled

           Shutdown   Oven cooling water chiller has failed

AMTetcher  *

Drytek1    *         
                                              
Drytek2    *   

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Mon Oct 13 08:57:25 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Mon, 13 Oct 2003 08:57:25 -0700
Subject: Etch Morning Report  Oct 13, 2003
Message-ID: <3F8ACB65.D5F1B3DF@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *    each user needs to verify Config values
                 values can change if power-cycled

AMTetcher  *

Drytek1    *         
                                              
Drytek2    *   

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    Shutdown   Elaheh reported load fault

Wafersaw   *


From booth at snf.stanford.edu  Tue Oct 14 08:41:41 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Tue, 14 Oct 2003 08:41:41 -0700
Subject: Etch Morning Report  Oct 14, 2003
Message-ID: <3F8C1935.5FF5E4C8@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *    each user needs to verify Config values
                 values can change if power-cycled

AMTetcher  *

Drytek1    *         
                                              
Drytek2    *   

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Wed Oct 15 08:44:15 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Wed, 15 Oct 2003 08:44:15 -0700
Subject: Etch Morning Report  Oct 15, 2003
Message-ID: <3F8D6B4F.B68076BC@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *    each user needs to verify Config values
                 values can change if power-cycled

AMTetcher  *

Drytek1    *         
                                              
Drytek2    *   

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Mon Oct 20 08:46:33 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Mon, 20 Oct 2003 08:46:33 -0700
Subject: Etch Morning Report  Oct 20, 2003
Message-ID: <3F940359.EFC24C9A@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *    each user needs to verify Config values
                 values can change if power-cycled

AMTetcher  Shutdown    tray #2 has arcing marks

Drytek1    *         
                                              
Drytek2    *   

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  Shutdown   heatexchangers not working
                                              
Pquest     Shutdown   System I/O not working

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Tue Oct 21 08:35:42 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Tue, 21 Oct 2003 08:35:42 -0700
Subject: Etch Morning Report  Oct 21, 2003
Message-ID: <3F95524E.29642E09@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *    each user needs to verify Config values
                 values can change if power-cycled

AMTetcher  Shutdown   reported by Elaheh

Drytek1    *         
                                              
Drytek2    *   

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     Shutdown   System I/O not working

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Wed Oct 22 08:49:35 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Wed, 22 Oct 2003 08:49:35 -0700
Subject: Etch Morning Report  Oct 22, 2003
Message-ID: <3F96A70F.5BC00DB6@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *    each user needs to verify Config values
                 values can change if power-cycled

AMTetcher  *

Drytek1    *         
                                              
Drytek2    *   

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     Shutdown   System I/O not working

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Thu Oct 23 08:36:49 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Thu, 23 Oct 2003 08:36:49 -0700
Subject: Etch Morning Report  Oct 23, 2003
Message-ID: <3F97F591.2FF30D06@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *    each user needs to verify Config values
                 values can change if power-cycled

AMTetcher  *

Drytek1    *         
                                              
Drytek2    *   

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   Shutdown   not responding to some commands


From booth at snf.stanford.edu  Mon Oct 27 09:07:29 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Mon, 27 Oct 2003 09:07:29 -0800
Subject: Etch Morning Report  Oct 27, 2003
Message-ID: <3F9D50D1.68ACA1B3@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *    each user needs to verify Config values
                 values can change if power-cycled

AMTetcher  *

Drytek1    *         
                                              
Drytek2    *   

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Tue Oct 28 08:57:52 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Tue, 28 Oct 2003 08:57:52 -0800
Subject: Etch Morning Report  Oct 28, 2003
Message-ID: <3F9EA010.EF61405E@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *    each user needs to verify Config values
                 values can change if power-cycled

AMTetcher  *

Drytek1    *         
                                              
Drytek2    *   

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  Shutdown   Heat Exchanger fault
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Thu Oct 30 09:10:08 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Thu, 30 Oct 2003 09:10:08 -0800
Subject: Etch Morning Report  Oct 30, 2003
Message-ID: <3FA145F0.89883107@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *    each user needs to verify Config values
                 values can change if power-cycled

AMTetcher  *

Drytek1    *         
                                              
Drytek2    *   

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *