From booth at snf.stanford.edu  Tue Sep  2 08:44:43 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Tue, 02 Sep 2003 08:44:43 -0700
Subject: Etch Morning Report  Sep 2, 2003
Message-ID: <3F54BAEB.F365D31B@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                 values can change if power-cycled

AMTetcher  *   

Drytek1    *         
                                              
Drytek2    *   

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   Shutdown   blades are breaking


From booth at snf.stanford.edu  Wed Sep  3 08:50:23 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Wed, 03 Sep 2003 08:50:23 -0700
Subject: Etch Morning Report  Sep 3, 2003
Message-ID: <3F560DBF.432F6F24@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                 values can change if power-cycled

AMTetcher  *   

Drytek1    *         
                                              
Drytek2    *   

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From mw1200 at naver.com  Fri Sep  5 10:04:44 2003
From: mw1200 at naver.com (°û¹ÌÈ­)
Date: Fri, 05 Sep 2003 11:04:44 -0600
Subject: (±¤°í)"¿Â°¡Á·ÀÌ ¸ð¿© Áñ°Å¿î ¸íÀýÀ»........   
Message-ID: <mailman.2.1356281591.3700.etch@snf.stanford.edu>

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From booth at snf.stanford.edu  Fri Sep  5 08:55:07 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Fri, 05 Sep 2003 08:55:07 -0700
Subject: Etch Morning Report  Sep 5, 2003
Message-ID: <3F58B1DB.DB560A44@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                 values can change if power-cycled

AMTetcher  *   

Drytek1    *         
                                              
Drytek2    *   

Drytek4    Shutdown   wiring for RF match needs to be repaired

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   Shutdown   repairs in progress


From booth at snf.stanford.edu  Mon Sep  8 08:32:32 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Mon, 08 Sep 2003 08:32:32 -0700
Subject: Etch Morning Report  Sep 08, 2003
Message-ID: <3F5CA110.51E88A8B@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                 values can change if power-cycled

           changing to oxidation quartzware this morning

AMTetcher  *   

Drytek1    *         
                                              
Drytek2    *   

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Tue Sep  9 08:38:30 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Tue, 09 Sep 2003 08:38:30 -0700
Subject: Etch Morning Report  Sept 09, 2003
Message-ID: <3F5DF3F6.C1E7CAB6@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                 values can change if power-cycled

AMTetcher  *   

Drytek1    *         
                                              
Drytek2    *   

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Wed Sep 10 08:46:45 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Wed, 10 Sep 2003 08:46:45 -0700
Subject: Etch Morning Report  Sep 10, 2003
Message-ID: <3F5F4765.321C002E@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                 values can change if power-cycled

AMTetcher  *   

Drytek1    *         
                                              
Drytek2    *   

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Fri Sep 12 08:50:37 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Fri, 12 Sep 2003 08:50:37 -0700
Subject: Etch Morning Report  Sep 12, 2003
Message-ID: <3F61EB4C.5D0B04FE@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                 values can change if power-cycled

AMTetcher  *   

Drytek1    *         
                                              
Drytek2    *   

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Mon Sep 15 08:23:54 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Mon, 15 Sep 2003 08:23:54 -0700
Subject: Etch Morning Report  Sep 15, 2003
Message-ID: <3F65D98A.81DEEE1B@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                 values can change if power-cycled

AMTetcher  *   

Drytek1    *         
                                              
Drytek2    *   

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Tue Sep 16 08:38:44 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Tue, 16 Sep 2003 08:38:44 -0700
Subject: Etch Morning Report  sep 16, 2003
Message-ID: <3F672E84.DD795256@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                 values can change if power-cycled

AMTetcher  *   

Drytek1    *         
                                              
Drytek2    *   

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Wed Sep 17 08:20:15 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Wed, 17 Sep 2003 08:20:15 -0700
Subject: Etch Morning Report  Sep 17, 2003
Message-ID: <3F687BAF.DA6E83ED@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                 values can change if power-cycled

AMTetcher  Shutdown   PCW valve is being replaced

Drytek1    *         
                                              
Drytek2    *   

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Fri Sep 19 08:36:30 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Fri, 19 Sep 2003 08:36:30 -0700
Subject: Etch Morning Report  Sep 19, 2003
Message-ID: <3F6B227E.5A543A58@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                 values can change if power-cycled

AMTetcher  *

Drytek1    *         
                                              
Drytek2    *   

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Mon Sep 22 08:53:20 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Mon, 22 Sep 2003 08:53:20 -0700
Subject: Etch Morning Report  Sep 22, 2003
Message-ID: <3F6F1AF0.36554394@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                 values can change if power-cycled

AMTetcher  *

Drytek1    *         
                                              
Drytek2    *   

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Tue Sep 23 08:59:04 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Tue, 23 Sep 2003 08:59:04 -0700
Subject: Etch Morning Report  Sep 23, 2003
Message-ID: <3F706DC8.7415AB7@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                 values can change if power-cycled

AMTetcher  *

Drytek1    *         
                                              
Drytek2    *   

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Wed Sep 24 08:33:40 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Wed, 24 Sep 2003 08:33:40 -0700
Subject: Etch Morning Report  Sep 24, 2003
Message-ID: <3F71B954.18661341@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                 values can change if power-cycled

AMTetcher  *

Drytek1    *         
                                              
Drytek2    *   

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        * wkinney e-mail report of electrode cooling trouble

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Thu Sep 25 09:42:56 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Thu, 25 Sep 2003 09:42:56 -0700
Subject: Etch Morning Report  Sep 25, 2003
Message-ID: <3F731B10.A616813D@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108     *     each user needs to verify Config values
                 values can change if power-cycled

AMTetcher  *

Drytek1    *         
                                              
Drytek2    *   

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Fri Sep 26 08:44:52 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Fri, 26 Sep 2003 08:44:52 -0700
Subject: Etch Morning Report  Sep 26, 2003
Message-ID: <3F745EF4.384037B5@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108          each user needs to verify Config values
                 values can change if power-cycled

           Shutdown   Quartzware has been contaminated

AMTetcher  *

Drytek1    *         
                                              
Drytek2    *   

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Mon Sep 29 08:55:18 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Mon, 29 Sep 2003 08:55:18 -0700
Subject: Etch Morning Report  Sep 29, 2003
Message-ID: <3F7855E6.BA943458@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108          each user needs to verify Config values
                 values can change if power-cycled

           Shutdown   Quartzware has been contaminated

AMTetcher  *

Drytek1    *         
                                              
Drytek2    *   

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *


From booth at snf.stanford.edu  Tue Sep 30 08:54:52 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Tue, 30 Sep 2003 08:54:52 -0700
Subject: Etch Morning Report  Sep 30, 2003
Message-ID: <3F79A74C.AAEE9911@snf.stanford.edu>

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
                             
AG4108          each user needs to verify Config values
                 values can change if power-cycled

           Shutdown   Quartzware has been contaminated
                      Ready for process testing

AMTetcher  *

Drytek1    *         
                                              
Drytek2    *   

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved, Jim McVittie

Lampoly    *

Lamsi      NOT installed
                                              
Matrix     *
                                              
MRC        *

P5000etch  *
                                              
Pquest     *

Prometrix  *    
                                               
RTAag      *
                                              
RTAgaas    NOT installed        
                                            
STSetch    *

Wafersaw   *