Etch report 20/02/04

Cesar Baxter cbaxter at snf.stanford.edu
Tue Apr 20 23:25:16 PDT 2004


Etch equipment status
Astrisk (*)= equipment is up and ready for use


AMTetch    Turbo pumping speed is weak. Will schedule system shutdowm
           and have turbo pump send out for rebuild.

Drytek#1   *   


Drytek#2   *


Drytek#4   *


Lampoly    *


Lamsi      Not installed


Gasonic    Waiting for process recipe to be developed (Jim McVittie)


Matrix     *


MRC        *


PQuest     *


P5000      *
           

STSetch    *


STShrm     Not installed     work in progress



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