Etch report 27/04/04

Cesar Baxter cbaxter at
Tue Apr 27 23:39:52 PDT 2004

AMTetch    Turbo pumping speed is weak. Reserve tool from 4pm to 11:30
           pm to leak check nupro valve with He.

Drytek#1   *   

Drytek#2   *

Drytek#4   *

Lampoly    *

Lamsi      Not installed

Gasonic    Waiting for process recipe to be developed (Jim McVittie)

Matrix     *

MRC        *

PQuest     *

P5000      *

STSetch    *

STShrm     Not installed     work in progress

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