Etch report 29/04/04

Cesar Baxter cbaxter at snf.stanford.edu
Thu Apr 29 23:10:29 PDT 2004


AMTetch    *

Drytek#1   *   


Drytek#2   *


Drytek#4   *


Lampoly    *


Lamsi      Not installed


Gasonic    Waiting for process recipe to be developed (Jim McVittie)


Matrix     *


MRC        *


PQuest     *


P5000      *
           

STSetch    Tool is shutdown, air cap inside the rf match is arcing
           will order new air cap. No estimated time how long the tool
           will remain on shutdown.

STShrm     Not installed     work in progress



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