Etch Report 12/13/04

Cesar Baxter cbaxter at snf.stanford.edu
Mon Dec 13 22:27:35 PST 2004


AMTetch    shutdown hex electrode is rotating. still trouble shooting.

Drytek#1   *   


Drytek#2   *


Drytek#4   *


Lampoly    * 


Lamsi      Not installed


Gasonic    * 


Matrix     *


MRC        *


PQuest     *


P5000      *

           

STSetch    Shutdown ceramic centering ring broke. Elmer will pick up the
           replacement ceramic tomorrow 12/14/04


STShrm     Process qual in progress


* Ready for use



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