Etch Equip Status Report @ 4pm Jan 5, 2004

Len Booth booth at
Mon Jan 5 15:51:14 PST 2004

Etch Group -  Morning Equipment Status Report 9:00 am
  Astrisk (*) = equipment up & ready for use
AG4108     *    each user needs to verify Config values
                 values can change if power-cycled

AMTetcher  Shutdown   more arcing has occurred

Drytek1    *         
Drytek2    *   

Drytek4    *

Gasonics   Shutdown   waiting for process recipe(s) to be
                          approved by Jim McVittie

Lampoly    Shutdown   electrode chiller will not restart

Lamsi      NOT installed
Matrix     *
MRC        *

P5000etch  Problem   Ch A is shutdown - pump is out being repaired
Pquest     *

Prometrix  *    
RTAag      *
RTAgaas    NOT installed        
STSetch    *

Wafersaw   *

More information about the etch mailing list