status

Cesar Baxter cbaxter at snf.stanford.edu
Tue Jan 6 23:21:29 PST 2004


Etch equipment status
Astrisk (*)= equipment is up and ready for use


AMTetche   *


Drytek#1   *   


Drytek#2   *


Drytek#4   *


Lampoly    Tool down for procon water pump. Pump is send out to be
           rebuild.

Lamsi      Not installed


Gasonic    Waiting for process recipe to be developed (Jim McVittie)


Matrix     *


MRC        *


PQuest     *


P5000      Chamber A vacuum pump was send out to be rebuild.
           Chamber B,C and D are ready for use.

STSetch    *



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