Cesar Baxter cbaxter at
Tue Jan 6 23:21:29 PST 2004

Etch equipment status
Astrisk (*)= equipment is up and ready for use

AMTetche   *

Drytek#1   *   

Drytek#2   *

Drytek#4   *

Lampoly    Tool down for procon water pump. Pump is send out to be

Lamsi      Not installed

Gasonic    Waiting for process recipe to be developed (Jim McVittie)

Matrix     *

MRC        *

PQuest     *

P5000      Chamber A vacuum pump was send out to be rebuild.
           Chamber B,C and D are ready for use.

STSetch    *

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