cbaxter at snf.stanford.edu
Tue Jan 6 23:21:29 PST 2004
Etch equipment status
Astrisk (*)= equipment is up and ready for use
Lampoly Tool down for procon water pump. Pump is send out to be
Lamsi Not installed
Gasonic Waiting for process recipe to be developed (Jim McVittie)
P5000 Chamber A vacuum pump was send out to be rebuild.
Chamber B,C and D are ready for use.
More information about the etch