Etch report 1/7/04

Cesar Baxter cbaxter at snf.stanford.edu
Wed Jan 7 23:38:33 PST 2004


Etch equipment status
Astrisk (*)= equipment is up and ready for use


AMTetch    *


Drytek#1   *   


Drytek#2   *


Drytek#4   *


Lampoly    Still waiting for procon water pump. Expected next week.


Lamsi      Not installed


Gasonic    Waiting for process recipe to be developed (Jim McVittie)


Matrix     *


MRC        *


PQuest     *


P5000      Chamber A rebuild pump expected this week.
           Chamber B,C and D are ready for use.

STSetch    *


STShrm     Not installed     work in progress



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