Etch report 1/8/04

Cesar Baxter cbaxter at
Thu Jan 8 23:35:15 PST 2004

Etch equipment status
Astrisk (*)= equipment is up and ready for use

AMTetch    *

Drytek#1   *   

Drytek#2   *

Drytek#4   *

Lampoly    Still waiting for procon water pump. Expected next week.

Lamsi      Not installed

Gasonic    Waiting for process recipe to be developed (Jim McVittie)

Matrix     *

MRC        *

PQuest     *

P5000      * Rebuild vacuum pump is installed on chamber A.
             All chambers are ready for use.

STSetch    *

STShrm     Not installed     work in progress

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