Etch report 1/8/04
cbaxter at snf.stanford.edu
Thu Jan 8 23:35:15 PST 2004
Etch equipment status
Astrisk (*)= equipment is up and ready for use
Lampoly Still waiting for procon water pump. Expected next week.
Lamsi Not installed
Gasonic Waiting for process recipe to be developed (Jim McVittie)
P5000 * Rebuild vacuum pump is installed on chamber A.
All chambers are ready for use.
STShrm Not installed work in progress
More information about the etch