From cbaxter at snf.stanford.edu  Thu Jul  1 23:14:22 2004
From: cbaxter at snf.stanford.edu (Cesar Baxter)
Date: Thu, 01 Jul 2004 23:14:22 -0700
Subject: Etch report 07/01/04
Message-ID: <40E4FD3E.1319CCDA@snf.stanford.edu>

AMTetch    *

Drytek#1   *   


Drytek#2   *


Drytek#4   *


Lampoly    *


Lamsi      Not installed


Gasonic    Waiting for process recipe to be developed (Jim McVittie)


Matrix     *


MRC        *


PQuest     *


P5000      *
           

STSetch    *


STShrm     Process qual in progress


From cbaxter at snf.stanford.edu  Tue Jul  6 23:07:31 2004
From: cbaxter at snf.stanford.edu (Cesar Baxter)
Date: Tue, 06 Jul 2004 23:07:31 -0700
Subject: Etch report 07/06/04
Message-ID: <40EB9323.A6ED0029@snf.stanford.edu>

AMTetch    *

Drytek#1   *   


Drytek#2   *


Drytek#4   *


Lampoly    *


Lamsi      Not installed


Gasonic    Waiting for process recipe to be developed (Jim McVittie)


Matrix     *


MRC        *


PQuest     *


P5000      *
           

STSetch    *


STShrm     Process qual in progress


From cbaxter at snf.stanford.edu  Wed Jul  7 23:21:49 2004
From: cbaxter at snf.stanford.edu (Cesar Baxter)
Date: Wed, 07 Jul 2004 23:21:49 -0700
Subject: Etch report 07/07/04
Message-ID: <40ECE7FD.D7A77E39@snf.stanford.edu>

AMTetch    *

Drytek#1   *   


Drytek#2   *


Drytek#4   *


Lampoly    *


Lamsi      Not installed


Gasonic    Waiting for process recipe to be developed (Jim McVittie)


Matrix     *


MRC        *


PQuest     *


P5000      *
           

STSetch    *


STShrm     Process qual in progress


From cbaxter at snf.stanford.edu  Thu Jul  8 23:20:44 2004
From: cbaxter at snf.stanford.edu (Cesar Baxter)
Date: Thu, 08 Jul 2004 23:20:44 -0700
Subject: Etch report 07/08/04
Message-ID: <40EE393C.A1BBFBDD@snf.stanford.edu>

AMTetch    *

Drytek#1   *   


Drytek#2   *


Drytek#4   *


Lampoly    *


Lamsi      Not installed


Gasonic    Waiting for process recipe to be developed (Jim McVittie)


Matrix     *


MRC        *


PQuest     *


P5000      *
           

STSetch    *


STShrm     Process qual in progress


From cbaxter at snf.stanford.edu  Fri Jul  9 22:42:54 2004
From: cbaxter at snf.stanford.edu (Cesar Baxter)
Date: Fri, 09 Jul 2004 22:42:54 -0700
Subject: Etch report 07/09/04
Message-ID: <40EF81DE.ED5FF5E9@snf.stanford.edu>

AMTetch    *

Drytek#1   *   


Drytek#2   *


Drytek#4   *


Lampoly    *


Lamsi      Not installed


Gasonic    Waiting for process recipe to be developed (Jim McVittie)


Matrix     *


MRC        *


PQuest     *


P5000      *
           

STSetch    *


STShrm     Process qual in progress


From cbaxter at snf.stanford.edu  Fri Jul 16 00:41:29 2004
From: cbaxter at snf.stanford.edu (Cesar Baxter)
Date: Fri, 16 Jul 2004 00:41:29 -0700
Subject: Etch report 07/15/04
Message-ID: <40F786A9.6BA8B3AD@snf.stanford.edu>

AMTetch    *

Drytek#1   *   


Drytek#2   *


Drytek#4   *


Lampoly    Tool is shutdown for Gap error, working on problem.


Lamsi      Not installed


Gasonic    Waiting for process recipe to be developed (Jim McVittie)


Matrix     *


MRC        *


PQuest     *


P5000      *
           

STSetch    *


STShrm     Process qual in progress


From cbaxter at snf.stanford.edu  Fri Jul 16 21:07:02 2004
From: cbaxter at snf.stanford.edu (Cesar Baxter)
Date: Fri, 16 Jul 2004 21:07:02 -0700
Subject: Etch report 07/16/04
Message-ID: <40F8A5E6.7AF11F4B@snf.stanford.edu>

AMTetch    *

Drytek#1   *   


Drytek#2   *


Drytek#4   *


Lampoly    Tool is shutdown. Gap error found bad AC to DC transformer
           shorted.


Lamsi      Not installed


Gasonic    Waiting for process recipe to be developed (Jim McVittie)


Matrix     *


MRC        *


PQuest     *


P5000      *
           

STSetch    *


STShrm     Process qual in progress


From cbaxter at snf.stanford.edu  Tue Jul 20 00:49:15 2004
From: cbaxter at snf.stanford.edu (Cesar Baxter)
Date: Tue, 20 Jul 2004 00:49:15 -0700
Subject: Etch report 07/19/04
Message-ID: <40FCCE7B.AD5994AD@snf.stanford.edu>

AMTetch    *

Drytek#1   *   


Drytek#2   *


Drytek#4   *


Lampoly    Tool is shutdown. Still troubleshooting Gap error problem.


Lamsi      Not installed


Gasonic    Waiting for process recipe to be developed (Jim McVittie)


Matrix     *


MRC        *


PQuest     *


P5000      User found residue on backside of the wafer. Chamber B needs
           wet clean.
           

STSetch    *


STShrm     Process qual in progress


From cbaxter at snf.stanford.edu  Wed Jul 21 00:03:03 2004
From: cbaxter at snf.stanford.edu (Cesar Baxter)
Date: Wed, 21 Jul 2004 00:03:03 -0700
Subject: Etch report 07/20/04
Message-ID: <40FE1527.F8097685@snf.stanford.edu>

AMTetch    *

Drytek#1   *   


Drytek#2   *


Drytek#4   *


Lampoly    Tool is shutdown. Still troubleshooting Gap error problem.


Lamsi      Not installed


Gasonic    Waiting for process recipe to be developed (Jim McVittie)


Matrix     *


MRC        *


PQuest     *


P5000      *
           

STSetch    *


STShrm     Process qual in progress


From cbaxter at snf.stanford.edu  Wed Jul 21 23:09:24 2004
From: cbaxter at snf.stanford.edu (Cesar Baxter)
Date: Wed, 21 Jul 2004 23:09:24 -0700
Subject: Etch report 07/21/04
Message-ID: <40FF5A14.E958F8DB@snf.stanford.edu>

AMTetch    *

Drytek#1   *   


Drytek#2   *


Drytek#4   *


Lampoly    Tool is shutdown. Still troubleshooting Gap error problem.


Lamsi      Not installed


Gasonic    Waiting for process recipe to be developed (Jim McVittie)


Matrix     *


MRC        *


PQuest     *


P5000      *
           

STSetch    *


STShrm     Process qual in progress


From cbaxter at snf.stanford.edu  Thu Jul 22 23:36:49 2004
From: cbaxter at snf.stanford.edu (Cesar Baxter)
Date: Thu, 22 Jul 2004 23:36:49 -0700
Subject: Etch report 07/22/04
Message-ID: <4100B201.13D5EF2@snf.stanford.edu>

AMTetch    *

Drytek#1   *   


Drytek#2   *


Drytek#4   *


Lampoly    Found the cause of the Gap error. a bad amplifier interlcok
           pcb. Will order a replacement pcb asap.


Lamsi      Not installed


Gasonic    Waiting for process recipe to be developed (Jim McVittie)


Matrix     *


MRC        *


PQuest     *


P5000      *
           

STSetch    *


STShrm     Process qual in progress


From cbaxter at snf.stanford.edu  Fri Jul 23 22:16:12 2004
From: cbaxter at snf.stanford.edu (Cesar Baxter)
Date: Fri, 23 Jul 2004 22:16:12 -0700
Subject: Etch report 07/23/04
Message-ID: <4101F09C.2263E207@snf.stanford.edu>

AMTetch    *

Drytek#1   *   


Drytek#2   *


Drytek#4   *


Lampoly    Found the cause of the Gap error. a bad amplifier interlcok
           pcb. Will order a replacement pcb asap.


Lamsi      Not installed


Gasonic    Waiting for process recipe to be developed (Jim McVittie)


Matrix     *


MRC        *


PQuest     *


P5000      *
           

STSetch    *


STShrm     Process qual in progress


From cbaxter at snf.stanford.edu  Sat Jul 24 17:39:20 2004
From: cbaxter at snf.stanford.edu (Cesar Baxter)
Date: Sat, 24 Jul 2004 17:39:20 -0700
Subject: Etch report 07/24/04
Message-ID: <41030138.1D2A485B@snf.stanford.edu>

AMTetch    *

Drytek#1   *   


Drytek#2   *


Drytek#4   *


Lampoly    * Tool is ready for use.


Lamsi      Not installed


Gasonic    Waiting for process recipe to be developed (Jim McVittie)


Matrix     *


MRC        *


PQuest     *


P5000      *
           

STSetch    *


STShrm     Process qual in progress


From cbaxter at snf.stanford.edu  Tue Jul 27 00:00:46 2004
From: cbaxter at snf.stanford.edu (Cesar Baxter)
Date: Tue, 27 Jul 2004 00:00:46 -0700
Subject: Etch report 07/26/04
Message-ID: <4105FD9E.C4D40BDF@snf.stanford.edu>

AMTetch    *

Drytek#1   *   


Drytek#2   *


Drytek#4   *


Lampoly    gap brake won't release. 


Lamsi      Not installed


Gasonic    Waiting for process recipe to be developed (Jim McVittie)


Matrix     *


MRC        *


PQuest     *


P5000      *
           

STSetch    *


STShrm     Process qual in progress


From cbaxter at snf.stanford.edu  Tue Jul 27 23:51:59 2004
From: cbaxter at snf.stanford.edu (Cesar Baxter)
Date: Tue, 27 Jul 2004 23:51:59 -0700
Subject: Etch report 07/27/04
Message-ID: <41074D0F.2E67D847@snf.stanford.edu>

AMTetch    *

Drytek#1   *   


Drytek#2   *


Drytek#4   *


Lampoly    gap brake won't release. 


Lamsi      Not installed


Gasonic    Waiting for process recipe to be developed (Jim McVittie)


Matrix     *


MRC        *


PQuest     *


P5000      *
           

STSetch    *


STShrm     Process qual in progress


From cbaxter at snf.stanford.edu  Thu Jul 29 02:03:26 2004
From: cbaxter at snf.stanford.edu (Cesar Baxter)
Date: Thu, 29 Jul 2004 02:03:26 -0700
Subject: Etch Report 07/28/04
Message-ID: <4108BD5E.5A3CB398@snf.stanford.edu>

AMTetch    *

Drytek#1   *   


Drytek#2   *


Drytek#4   *


Lampoly    * Ready for use


Lamsi      Not installed


Gasonic    Waiting for process recipe to be developed (Jim McVittie)


Matrix     *


MRC        *


PQuest     *


P5000      *
           

STSetch    *


STShrm     Process qual in progress