Etch report 06/14/04

Cesar Baxter cbaxter at snf.stanford.edu
Mon Jun 14 23:41:38 PDT 2004


AMTetch    *

Drytek#1   *   


Drytek#2   Problem with process#1 adjustable coil pot on auto tune box.
           Coil pot is open, process #2 and 3 are ok to use.


Drytek#4   *


Lampoly    *


Lamsi      Not installed


Gasonic    Waiting for process recipe to be developed (Jim McVittie)


Matrix     *


MRC        *


PQuest     *


P5000      *
           

STSetch    *


STShrm     Process qual in progress



More information about the etch mailing list