Etch report 03/08/04

Cesar Baxter cbaxter at
Tue Mar 9 00:11:51 PST 2004

Etch equipment status
Astrisk (*)= equipment is up and ready for use

AMTetch    *

Drytek#1   *   

Drytek#2   *

Drytek#4   Tool is shutdown. Logic problem does not recognize recipe
           when is selected

Lampoly    *

Lamsi      Not installed

Gasonic    Waiting for process recipe to be developed (Jim McVittie)

Matrix     *

MRC        *

PQuest     *

P5000      *

STSetch    *

STShrm     Not installed     work in progress

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