Etch report 26/03/04

Cesar Baxter cbaxter at snf.stanford.edu
Fri Mar 26 21:48:06 PST 2004


Etch equipment status
Astrisk (*)= equipment is up and ready for use


AMTetch    *


Drytek#1   *   


Drytek#2   *


Drytek#4   * 


Lampoly    *


Lamsi      Not installed


Gasonic    Waiting for process recipe to be developed (Jim McVittie)


Matrix     *


MRC        *


PQuest     *


P5000      System is shutdown for Heat exchanger low flow. The turbine
           water pump is bad. Will order a replacement pump asap.
           

STSetch    *


STShrm     Not installed     work in progress



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