From cbaxter at snf.stanford.edu Tue May 4 23:18:48 2004 From: cbaxter at snf.stanford.edu (Cesar Baxter) Date: Tue, 04 May 2004 23:18:48 -0700 Subject: Etch report 04/05/04 Message-ID: <40988748.F95CD63D@snf.stanford.edu> AMTetch * Drytek#1 * Drytek#2 * Drytek#4 * Lampoly * Lamsi Not installed Gasonic Waiting for process recipe to be developed (Jim McVittie) Matrix * MRC * PQuest * P5000 * STSetch * STShrm Not installed work in progress From cbaxter at snf.stanford.edu Wed May 5 23:18:03 2004 From: cbaxter at snf.stanford.edu (Cesar Baxter) Date: Wed, 05 May 2004 23:18:03 -0700 Subject: Etch report 05/05/04 Message-ID: <4099D89B.6662356A@snf.stanford.edu> AMTetch * Drytek#1 * Drytek#2 * Drytek#4 * Lampoly * Lamsi Not installed Gasonic Waiting for process recipe to be developed (Jim McVittie) Matrix * MRC * PQuest * P5000 * STSetch shutdown bad phase/mag detector module for coil rf match STShrm Not installed work in progress From cbaxter at snf.stanford.edu Tue May 18 22:04:10 2004 From: cbaxter at snf.stanford.edu (Cesar Baxter) Date: Tue, 18 May 2004 22:04:10 -0700 Subject: Etch report 05/18/04 Message-ID: <40AAEACA.F10861A6@snf.stanford.edu> AMTetch * Drytek#1 * Drytek#2 * Drytek#4 * Lampoly * Lamsi Not installed Gasonic Waiting for process recipe to be developed (Jim McVittie) Matrix * MRC * PQuest * P5000 * STSetch * STShrm Not installed work in progress From cbaxter at snf.stanford.edu Thu May 20 22:06:22 2004 From: cbaxter at snf.stanford.edu (Cesar Baxter) Date: Thu, 20 May 2004 22:06:22 -0700 Subject: Etch report 20/05/04 Message-ID: <40AD8E4E.CA704BB5@snf.stanford.edu> AMTetch * Drytek#1 * Drytek#2 * Drytek#4 * Lampoly * Lamsi Not installed Gasonic Waiting for process recipe to be developed (Jim McVittie) Matrix * MRC * PQuest * P5000 * STSetch * STShrm Not installed work in progress From cbaxter at snf.stanford.edu Fri May 21 22:30:25 2004 From: cbaxter at snf.stanford.edu (Cesar Baxter) Date: Fri, 21 May 2004 22:30:25 -0700 Subject: Etch report 05/21/04 Message-ID: <40AEE571.CACDF4CD@snf.stanford.edu> AMTetch * Drytek#1 * Drytek#2 * Drytek#4 * Lampoly * Lamsi Not installed Gasonic Waiting for process recipe to be developed (Jim McVittie) Matrix * MRC * PQuest * P5000 * STSetch * STShrm Not installed work in progress From cbaxter at snf.stanford.edu Mon May 24 23:14:20 2004 From: cbaxter at snf.stanford.edu (Cesar Baxter) Date: Mon, 24 May 2004 23:14:20 -0700 Subject: Etch report 05/24/04 Message-ID: <40B2E43C.39955372@snf.stanford.edu> AMTetch * Drytek#1 * Drytek#2 * Drytek#4 * Lampoly * Lamsi Not installed Gasonic Waiting for process recipe to be developed (Jim McVittie) Matrix Not pumping down. Bad vacuum pump(seize) MRC * PQuest * P5000 * STSetch * STShrm Not installed work in progress From cbaxter at snf.stanford.edu Tue May 25 23:43:56 2004 From: cbaxter at snf.stanford.edu (Cesar Baxter) Date: Tue, 25 May 2004 23:43:56 -0700 Subject: Etch report 5/25/04 Message-ID: <40B43CAC.4F439266@snf.stanford.edu> AMTetch * Drytek#1 * Drytek#2 * Drytek#4 * Lampoly * Lamsi Not installed Gasonic Waiting for process recipe to be developed (Jim McVittie) Matrix Vacuum pump due back from repair 5/27 MRC * PQuest * P5000 * STSetch * STShrm Not installed work in progress From cbaxter at snf.stanford.edu Wed May 26 23:20:04 2004 From: cbaxter at snf.stanford.edu (Cesar Baxter) Date: Wed, 26 May 2004 23:20:04 -0700 Subject: Etch report 05/26/04 Message-ID: <40B58894.EDE5D264@snf.stanford.edu> AMTetch * Drytek#1 * Drytek#2 * Drytek#4 * Lampoly * Lamsi Not installed Gasonic Waiting for process recipe to be developed (Jim McVittie) Matrix Vacuum pump due back from repair 5/27 MRC * PQuest * P5000 * STSetch * STShrm Not installed work in progress From cbaxter at snf.stanford.edu Thu May 27 22:55:33 2004 From: cbaxter at snf.stanford.edu (Cesar Baxter) Date: Thu, 27 May 2004 22:55:33 -0700 Subject: Etch report 05/27/04 Message-ID: <40B6D455.DFC9B222@snf.stanford.edu> AMTetch * Drytek#1 * Drytek#2 * Drytek#4 * Lampoly * Lamsi Not installed Gasonic Waiting for process recipe to be developed (Jim McVittie) Matrix Vacuum pump due back from repair 5/28 MRC * PQuest * P5000 * STSetch * STShrm Not installed work in progress From cbaxter at snf.stanford.edu Fri May 28 20:08:40 2004 From: cbaxter at snf.stanford.edu (Cesar Baxter) Date: Fri, 28 May 2004 20:08:40 -0700 Subject: Etch report 05/28/04 Message-ID: <40B7FEB7.EB7CD64A@snf.stanford.edu> AMTetch * Drytek#1 * Drytek#2 * Drytek#4 * Lampoly * Lamsi Not installed Gasonic Waiting for process recipe to be developed (Jim McVittie) Matrix * MRC * PQuest * P5000 * STSetch * STShrm Not installed work in progress