Etch report 05/24/04

Cesar Baxter cbaxter at snf.stanford.edu
Mon May 24 23:14:20 PDT 2004


AMTetch    *

Drytek#1   *   


Drytek#2   *


Drytek#4   *


Lampoly    *


Lamsi      Not installed


Gasonic    Waiting for process recipe to be developed (Jim McVittie)


Matrix     Not pumping down. Bad vacuum pump(seize)


MRC        *


PQuest     *


P5000      *
           

STSetch    *


STShrm     Not installed work in progress



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