Etch report 11/10/04

Cesar Baxter cbaxter at snf.stanford.edu
Tue Oct 12 00:03:56 PDT 2004


AMTetch    *

Drytek#1   *   


Drytek#2   *


Drytek#4   *


Lampoly    Gap rebuild in Progress. Tool is shutdown.


Lamsi      Not installed


Gasonic    * 


Matrix     *


MRC        *


PQuest     *


P5000      Chamber A is shutdown, need new vesple fingers. Chamber
           B,C and D are ok to use.
           

STSetch    *


STShrm     Process qual in progress


* Ready for use



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