Etch report 12/10/04

Cesar Baxter cbaxter at
Wed Oct 13 00:46:40 PDT 2004

AMTetch    *

Drytek#1   *   

Drytek#2   *

Drytek#4   *

Lampoly    Gap rebuild completed. need to set up gap and parallelism.

Lamsi      Not installed

Gasonic    * 

Matrix     *

MRC        *

PQuest     *

P5000      Chamber A is shutdown, need new vesple fingers. Chamber
           B,C and D are ok to use.

STSetch    *

STShrm     Process qual in progress

* Ready for use

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